A high accuracy image sensor for sinusoidal phase-modulating interferometry
文献类型：期刊论文
| 作者 | Guotian He ; Dailin Li ; Wang XC(王向朝) ; Jianmin Hu |
| 刊名 | optik
 |
| 出版日期 | 2008 |
| 卷号 | 119期号:7页码:315 |
| 关键词 | image sensor synchronization technology sampling error CCD sinusoidal phase modulating |
| ISSN号 | 0030-4026 |
| 中文摘要 | we proposed a high accuracy image sensor technique for sinusoidal phase-modulating interferometer in the field of the surface profile measurements. it solved the problem of the ccd's pixel offset of the same column under two adjacent rows, eliminated the spectral leakage, and reduced the influence of external interference to the measurement accuracy. we measured the surface profile of a glass plate, and its repeatability precision was less than 8 nm and its relative error was 1.15 %. the results show that it can be used to measure surface profile with high accuracy and strong anti-interference ability. (c) 2007 elsevier gmbh. all rights reserved. |
| 收录类别 | EI |
| 语种 | 英语 |
| 公开日期 | 2009-09-18 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/2298]  |
| 专题 | 上海光学精密机械研究所_信息光学开放实验室 |
| 推荐引用方式 GB/T 7714 | Guotian He,Dailin Li,Wang XC,et al. A high accuracy image sensor for sinusoidal phase-modulating interferometry[J]. optik,2008,119(7):315, 320. |
| APA | Guotian He,Dailin Li,王向朝,&Jianmin Hu.(2008).A high accuracy image sensor for sinusoidal phase-modulating interferometry.optik,119(7),315. |
| MLA | Guotian He,et al."A high accuracy image sensor for sinusoidal phase-modulating interferometry".optik 119.7(2008):315. |
入库方式： OAI收割
来源：上海光学精密机械研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。