Hourglass-shaped X-ray compound refractive lens made by back-mask exposure technology
文献类型:期刊论文
作者 | Yan-Qing, Z; Jing-Qiu, L; Zhong-Zhu, L; Huang, XH; Le, ZC; Yi, FT![]() ![]() ![]() |
刊名 | ACTA PHYSICA SINICA
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出版日期 | 2009 |
卷号 | 58期号:3页码:1526-1530 |
关键词 | compound refractive lens (CRL) back-mask exposure hourglass shape SU-8 |
通讯作者 | [Yan-Qing, Zhu ; Jing-Qiu, Liang ; Zhong-Zhu, Liang ; Huang Xin-Hua ; Wang Wei-Biao ; Cui Nai-Di] Chinese Acad Sci, Changchun Inst Opt Fine Mech & Phys, State Key Lab Appl Opt, Changchun 130033, Jilin, Peoples R China ; [Yan-Qing, Zhu ; Huang Xin-Hua ; Cui Nai-Di] Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China ; [Le Zi-Chun ; Dong Wen] Zhejiang Univ Technol, Hangzhou 310032, Zhejiang, Peoples R China ; [Yi Fu-Ting ; Hou Feng-Jie ; Huang Wan-Xia ; Wang Zhi-Li] Chinese Acad Sci, Inst High Energy Phys, Beijing 1000349, Peoples R China |
英文摘要 | Using back-mask exposure technology, the hourglass-shaped X-ray compound refractive lens (XCRL) was made. Firstly, the theory of the refractive focusing of the hourglass-shaped XCRL was analyzed. Then the hourglass-shaped XCRL was manufactured using back-mask exposure technology for the first time, which avoids two-time masking and reduces the transfer times of the figure. The refractive focusing performance of the lens was tested with 10 keV monochromatic X-ray. The experimental results indicated that it has good focusing performance in one dimension, which is in general coincident with the calculated results. |
学科主题 | Physics |
类目[WOS] | Physics, Multidisciplinary |
研究领域[WOS] | Physics |
原文出处 | SCI |
语种 | 英语 |
WOS记录号 | WOS:000264781600023 |
源URL | [http://ir.ihep.ac.cn/handle/311005/239402] ![]() |
专题 | 高能物理研究所_多学科研究中心 |
作者单位 | 中国科学院高能物理研究所 |
推荐引用方式 GB/T 7714 | Yan-Qing, Z,Jing-Qiu, L,Zhong-Zhu, L,et al. Hourglass-shaped X-ray compound refractive lens made by back-mask exposure technology[J]. ACTA PHYSICA SINICA,2009,58(3):1526-1530. |
APA | Yan-Qing, Z.,Jing-Qiu, L.,Zhong-Zhu, L.,Huang, XH.,Le, ZC.,...&王志立.(2009).Hourglass-shaped X-ray compound refractive lens made by back-mask exposure technology.ACTA PHYSICA SINICA,58(3),1526-1530. |
MLA | Yan-Qing, Z,et al."Hourglass-shaped X-ray compound refractive lens made by back-mask exposure technology".ACTA PHYSICA SINICA 58.3(2009):1526-1530. |
入库方式: OAI收割
来源:高能物理研究所
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