Control of deposition channels in nanosphere templates for high-density nanodot array production
文献类型：期刊论文
| 作者 | Wu, PW; Peng LQ(彭良强); Peng, LQ; Tuo, XL; Wang, XG; Yuan, J |
| 刊名 | NANOTECHNOLOGY
 |
| 出版日期 | 2005 |
| 卷号 | 16期号:9页码:1693-1696 |
| 通讯作者 | Tsing Hua Univ, Sch Mat Sci & Engn, Electron Microscope Lab, Beijing 100084, Peoples R China ; Chinese Acad Sci, Inst High Energy Phys, Beijing 100039, Peoples R China ; Tsing Hua Univ, Sch Mat Sci & Engn, Dept Chem Engn, Beijing, Peoples R China |
| 英文摘要 | The deformation of 'soft' polystyrene spheres is found to limit the usefulness of nanosphere lithography in high-density applications because of the eventual closure of the void areas between the self-assembled nanospheres which function as channels for material deposition. We have used a plasma etching technique to reopen and enlarge these channels in the template in a controlled manner. This enables the controlled fabrication of a range of nanoarrays of very high density and variable sizes. The resulting shape of the nanodots produced can be understood by considering the etching-induced surface diffusion of the polystyrene in the plasma treatment. |
| 学科主题 | Science & Technology - Other Topics; Materials Science; Physics |
| 类目[WOS] | Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied |
| 研究领域[WOS] | Science & Technology - Other Topics ; Materials Science ; Physics |
| 原文出处 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000232089500047 |
| 源URL | [http://ir.ihep.ac.cn/handle/311005/239481]  |
| 专题 | 高能物理研究所_多学科研究中心 |
| 作者单位 | 中国科学院高能物理研究所 |
| 推荐引用方式 GB/T 7714 | Wu, PW,Peng LQ,Peng, LQ,et al. Control of deposition channels in nanosphere templates for high-density nanodot array production[J]. NANOTECHNOLOGY,2005,16(9):1693-1696. |
| APA | Wu, PW,彭良强,Peng, LQ,Tuo, XL,Wang, XG,&Yuan, J.(2005).Control of deposition channels in nanosphere templates for high-density nanodot array production.NANOTECHNOLOGY,16(9),1693-1696. |
| MLA | Wu, PW,et al."Control of deposition channels in nanosphere templates for high-density nanodot array production".NANOTECHNOLOGY 16.9(2005):1693-1696. |
入库方式： OAI收割
来源：高能物理研究所
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