中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Microstructural features of DC sputtered vanadium oxide thin films

文献类型:期刊论文

作者Pan MX(潘梦霄); Cao XZ(曹兴忠); Wang BY(王宝义); Ma CX(马创新); Zhou CL(周春兰); Wei L(魏龙); Pan, MX; Cao, XZ; Li, YX; Wang, BY
刊名ACTA PHYSICA SINICA
出版日期2004
卷号53期号:6页码:1956-1960
关键词microstructure thin films of vanadium oxides preferred orientation DC magnetron sputtering
通讯作者Chinese Acad Sci, Inst High Energy Phys, Key Lab Nucl Anal Tech, Beijing 100039, Peoples R China ; Hebei Univ Technol, Inst Mat Sci & Engn, Tianjin 300130, Peoples R China ; Lanzhou Univ, Key Lab Magnetism & Magnet Mat, Minist Educ, Lanzhou 730000, Peoples R China
英文摘要V2O5 thin films with a preferred orientation were deposited on Si (100) substrate by reactive dc magnetron sputtering. The surface morphology and structural features were studied by XRD, SEM and FTIR to ensure the growth of V2O5 films. These investigations revealed that the chemical composition and the orientation of the films were affected by the oxygen partial pressure. Nano-grain V2O5 films can be grown with a layered structure at oxygen partial pressure of 0.4Pa. V2O5 film could be converted to (001) oriented VO2 film after vacuum annealing process.
学科主题Physics
类目[WOS]Physics, Multidisciplinary
研究领域[WOS]Physics
原文出处SCI
语种英语
WOS记录号WOS:000221946200063
源URL[http://ir.ihep.ac.cn/handle/311005/239594]  
专题高能物理研究所_核技术应用研究中心
高能物理研究所_多学科研究中心
中国科学院高能物理研究所_中国散裂中子源
作者单位中国科学院高能物理研究所
推荐引用方式
GB/T 7714
Pan MX,Cao XZ,Wang BY,et al. Microstructural features of DC sputtered vanadium oxide thin films[J]. ACTA PHYSICA SINICA,2004,53(6):1956-1960.
APA 潘梦霄.,曹兴忠.,王宝义.,马创新.,周春兰.,...&Wei, L.(2004).Microstructural features of DC sputtered vanadium oxide thin films.ACTA PHYSICA SINICA,53(6),1956-1960.
MLA 潘梦霄,et al."Microstructural features of DC sputtered vanadium oxide thin films".ACTA PHYSICA SINICA 53.6(2004):1956-1960.

入库方式: OAI收割

来源:高能物理研究所

浏览0
下载0
收藏0
其他版本

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。