High-fidelity replication of Dammann gratings using soft lithography
文献类型：期刊论文
| 作者 | Wang Wei ; Zhou CH(周常河) ; Jia Wei |
| 刊名 | appl. optics
 |
| 出版日期 | 2008 |
| 卷号 | 47期号:10页码:1427 |
| 关键词 | Dammann gratings Diffraction imaging Grating structures High throughputs High-fidelity Light intensities Low costs Optical performances Soft-lithography Surface reliefs UV-curable |
| ISSN号 | 0003-6935 |
| 中文摘要 | we report the experimental results of using the soft lithography method for replication of dammann gratings. by using an elastomeric stamp, uniform grating structures were transferred to the ltv-curable polymer. to evaluate the quality of the replication, diffraction images and light intensity were measured. compared with the master devices, the replicas of dammann gratings show a slight deviation in both surface relief profile and optical performance. experimental results demonstrated that high-fidelity replication of dammann gratings is realized by using soft lithography with low cost and high throughput. (c) 2008 optical society of america. |
| 收录类别 | EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000255345400025 |
| 公开日期 | 2009-09-18 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/2314]  |
| 专题 | 上海光学精密机械研究所_信息光学开放实验室 |
| 推荐引用方式 GB/T 7714 | Wang Wei,Zhou CH,Jia Wei. High-fidelity replication of Dammann gratings using soft lithography[J]. appl. optics,2008,47(10):1427, 1429. |
| APA | Wang Wei,周常河,&Jia Wei.(2008).High-fidelity replication of Dammann gratings using soft lithography.appl. optics,47(10),1427. |
| MLA | Wang Wei,et al."High-fidelity replication of Dammann gratings using soft lithography".appl. optics 47.10(2008):1427. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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