Real-time micro-vibration measurement in sinusoidal phase-modulating interferometry
文献类型：期刊论文
| 作者 | He Guotian ; Wang XC(王向朝) |
| 刊名 | optik
 |
| 出版日期 | 2009 |
| 卷号 | 120期号:3页码:101 |
| ISSN号 | 0030-4026 |
| 关键词 | Real-time measurement Optic testing Interferometer Laser diode Vibration |
| 中文摘要 | as there exist some problems with the previous laser diode (ld) real-time microvibration measurement interferometers, such as low accuracy, correction before every use, etc., in this paper, we propose a new technique to realize the real-time microvibration measurement by using the ld sinusoidal phase-modulating interferometer, analyze the measurement theory and error, and simulate the measurement accuracy. this interferometer utilizes a circuit to process the interference signal in order to obtain the vibration frequency and amplitude of the detective signal, and a computer is not necessary in it. the influence of the varying light intensity and light path difference on the measurement result can be eliminated. this technique is real-time, convenient, fast, and can enhance the measurement accuracy too. experiments show that the repeatable measurement accuracy is less than 3.37 nm, and this interferometer can be applied to real-time microvibration measurement of the mems. (c) 2007 elsevier gmbh. all rights reserved. |
| 资助信息 | national natural science foundation of china [60578051]; international cooperation program project of shanghai, china [051107085] |
| 语种 | 英语 |
| 公开日期 | 2009-09-18 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/2376]  |
| 专题 | 上海光学精密机械研究所_信息光学开放实验室 |
| 推荐引用方式 GB/T 7714 | He Guotian,Wang XC. Real-time micro-vibration measurement in sinusoidal phase-modulating interferometry[J]. optik,2009,120(3):101, 105. |
| APA | He Guotian,&王向朝.(2009).Real-time micro-vibration measurement in sinusoidal phase-modulating interferometry.optik,120(3),101. |
| MLA | He Guotian,et al."Real-time micro-vibration measurement in sinusoidal phase-modulating interferometry".optik 120.3(2009):101. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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