Nanobowl array fabrication based on nanoimprint lithography
文献类型：期刊论文
| 作者 | Zhang, Man; Deng, Qiling; Shi, Lifang; Cao, Axiu; Pang, Hui; Hu, Song |
| 刊名 | OPTIK
 |
| 出版日期 | 2016 |
| 卷号 | 127期号:1页码:145-147 |
| 关键词 | Nanobowl array Self-assembly Nanoimprint lithography Lift-off |
| ISSN号 | 0030-4026 |
| 英文摘要 | This paper presents a fabrication method of nanobowl array by combining polystyrenes spheres (PSs) self-assembly, nanoimprint lithography (NIL), and lift-off process. A self-assembly monolayer of PSs on the quartz wafer is used as the nanoimprint mold. After separating the mold, the residual PSs onto the nanoimprint resist can be lifted off in the hydrofluoric acid solution and the nanobowl array is achieved. The size of the nanobowl can be modulated by the thickness of the nanoimprint resist. Using this method, different size of nanobowl arrays with high-resolution nanogap and nanoholes were fabricated, which has great potential to serve as a reaction container, catalyst and surface enhanced Raman scattering substrate. (C) 2015 Elsevier GmbH. All rights reserved. |
| WOS标题词 | Science & Technology ; Physical Sciences |
| 类目[WOS] | Optics |
| 研究领域[WOS] | Optics |
| 关键词[WOS] | NANOSPHERE LITHOGRAPHY ; SILICON NANOPILLARS ; NANOPARTICLES ; TEMPLATE ; STAMPS ; NICKEL |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000368212200032 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/3831]  |
| 专题 | 光电技术研究所_光电技术研究所被WoS收录文章 |
| 作者单位 | Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Man,Deng, Qiling,Shi, Lifang,et al. Nanobowl array fabrication based on nanoimprint lithography[J]. OPTIK,2016,127(1):145-147. |
| APA | Zhang, Man,Deng, Qiling,Shi, Lifang,Cao, Axiu,Pang, Hui,&Hu, Song.(2016).Nanobowl array fabrication based on nanoimprint lithography.OPTIK,127(1),145-147. |
| MLA | Zhang, Man,et al."Nanobowl array fabrication based on nanoimprint lithography".OPTIK 127.1(2016):145-147. |
入库方式： OAI收割
来源：光电技术研究所
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