Design and control of an ultraprecision stage used in grating tiling
文献类型：期刊论文
| 作者 | Wang Yong and Liu Zhigang and Bo Feng and朱健强 |
| 刊名 | chinese journal of mechanical engineering (english edition)
 |
| 出版日期 | 2007 |
| 卷号 | 20期号:1页码:1 |
| 关键词 | Control Design Diffraction gratings High energy lasers Mechanisms Piezoelectric actuators Stability Voltage control |
| ISSN号 | 1000-9345 |
| 中文摘要 | in petawatt laser system, the gratings used to compose pulse compressor are very large in size which can be only acquired currently by arraying small aperture gratings to form a large one instead, an approach referred to as grating tiling. theory and experiments have demonstrated that the coherent addition of multiple small gratings to form a larger grating is viable, the key technology of which is to control the relative position and orientation of each grating with high precision. according to the main factors that affect the performance of the grating tiling, a 5-dof ultraprecision stage is developed for the grating tiling experiment. the mechanism is formed by serial structures. the motion of the mechanism is guided by flexure hinges and driven by piezoelectric actuators and the movement resolution of which can achieve nanometer level. to keep the stability of the mechanism, capacitive position sensors with nanometer accuracy are fixed on it to provide feedback signals with which to realize closed-loop control, thus the positioning precision of the mechanism is within several nanometers range through voltage control and digital pid algorithm. results of experiments indicate that the performance of the mechanism can meet the requirement of precision for grating tiling.} |
| 收录类别 | EI |
| 语种 | 英语 |
| 公开日期 | 2009-09-18 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/3090]  |
| 专题 | 上海光学精密机械研究所_高功率激光物理国家实验室 |
| 推荐引用方式 GB/T 7714 | Wang Yong and Liu Zhigang and Bo Feng and朱健强. Design and control of an ultraprecision stage used in grating tiling[J]. chinese journal of mechanical engineering (english edition),2007,20(1):1, 4. |
| APA | Wang Yong and Liu Zhigang and Bo Feng and朱健强.(2007).Design and control of an ultraprecision stage used in grating tiling.chinese journal of mechanical engineering (english edition),20(1),1. |
| MLA | Wang Yong and Liu Zhigang and Bo Feng and朱健强."Design and control of an ultraprecision stage used in grating tiling".chinese journal of mechanical engineering (english edition) 20.1(2007):1. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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