System error removal and structure optimization based on Fizeau interferometer
文献类型:期刊论文
作者 | Cao Xiaojun ; Zhu JQ(朱健强) ; Li Yanhong ; Lin Qiang |
刊名 | optik
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出版日期 | 2007 |
卷号 | 118期号:10页码:495 |
关键词 | fizeau interferometer measurement error phase distribution wavefront error |
ISSN号 | 0030-4026 |
中文摘要 | in the process of interferometric testing, the measurement result is influenced by the system structure, which reduces the measurement accuracy. to obtain an accurate test result, it is necessary to analyze the test system, and build the relationship between the measurement error and the system parameters. in this paper, the influences of the system elements which include the collimated lens and the standard surface on the interferometric testing are analyzed, the expressions of phase distribution and wavefront error on the detector are obtained, the method to remove some element errors is introduced, and the optimization structure relationships are given. (c) 2006 elsevier gmbh. all rights reserved. |
收录类别 | EI |
语种 | 英语 |
WOS记录号 | WOS:000250336300006 |
公开日期 | 2009-09-18 |
源URL | [http://ir.siom.ac.cn/handle/181231/3116] ![]() |
专题 | 上海光学精密机械研究所_高功率激光物理国家实验室 |
推荐引用方式 GB/T 7714 | Cao Xiaojun,Zhu JQ,Li Yanhong,et al. System error removal and structure optimization based on Fizeau interferometer[J]. optik,2007,118(10):495, 501. |
APA | Cao Xiaojun,朱健强,Li Yanhong,&Lin Qiang.(2007).System error removal and structure optimization based on Fizeau interferometer.optik,118(10),495. |
MLA | Cao Xiaojun,et al."System error removal and structure optimization based on Fizeau interferometer".optik 118.10(2007):495. |
入库方式: OAI收割
来源:上海光学精密机械研究所
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