Influence of Deposition Temperature on Microstructures and Mechanical Properties of Magnetron Sputtered V-Al-Si-N Coatings
文献类型：期刊论文
| 作者 | Wang Enqing ; Li Miaolei ; Zhu Ping ; Huang Feng ; Yue Jianling |
| 刊名 | Chinese Journal of Vacuum Science and Technology
 |
| 出版日期 | 2015 |
| 卷号 | 35期号:8页码:1005-1010 |
| 中文摘要 | 采用磁控溅射工艺制备了不同沉积温度的V-A1-Si-N涂层,利用X射线衍射、扫描电镜、纳米压痕仪和摩擦磨损试验机对涂层的结构和性能进行了分析 |
| 公开日期 | 2016-09-18 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/12707]  |
| 专题 | 宁波材料技术与工程研究所_2015专题 |
| 推荐引用方式 GB/T 7714 | Wang Enqing,Li Miaolei,Zhu Ping,et al. Influence of Deposition Temperature on Microstructures and Mechanical Properties of Magnetron Sputtered V-Al-Si-N Coatings[J]. Chinese Journal of Vacuum Science and Technology,2015,35(8):1005-1010. |
| APA | Wang Enqing,Li Miaolei,Zhu Ping,Huang Feng,&Yue Jianling.(2015).Influence of Deposition Temperature on Microstructures and Mechanical Properties of Magnetron Sputtered V-Al-Si-N Coatings.Chinese Journal of Vacuum Science and Technology,35(8),1005-1010. |
| MLA | Wang Enqing,et al."Influence of Deposition Temperature on Microstructures and Mechanical Properties of Magnetron Sputtered V-Al-Si-N Coatings".Chinese Journal of Vacuum Science and Technology 35.8(2015):1005-1010. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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