Analysis of modulated free-carrier absorption measurement of electronic transport properties of silicon wafers
文献类型：期刊论文
| 作者 | Wei Li; Bincheng Li |
| 刊名 | Journal of Physics: Conference Series
 |
| 出版日期 | 2010 |
| 卷号 | 214 |
| 通讯作者 | Wei Li |
| 中文摘要 | Based on a three-dimensional modulated free carrier absorption (MFCA) model, theoretical analysis is performed to investigate the dependences of MFCA amplitude and phase on the electronic transport properties (the carrier lifetime, the carrier diffusivity, and the front surface recombination velocity) at different pump-to-probe separations and different modulation frequencies. The sensitivity of the multi-parameter estimate employing the dependences of the MFCA amplitude and phase on the modulation frequency at several pump-to-probe separations is theoretically compared with that employing the dependences on the pump-to-probe separation measured at several modulation frequencies. Simulation results show that the two approaches have comparable sensitivities to the electronic transport properties of silicon wafers. As for the MFCA experiments, the frequency scan data measured at different pump-to-probe separations have higher signal-to-noise ratios and therefore should be preferable to the simultaneous determination of the multiple transport properties. |
| 英文摘要 | Based on a three-dimensional modulated free carrier absorption (MFCA) model, theoretical analysis is performed to investigate the dependences of MFCA amplitude and phase on the electronic transport properties (the carrier lifetime, the carrier diffusivity, and the front surface recombination velocity) at different pump-to-probe separations and different modulation frequencies. The sensitivity of the multi-parameter estimate employing the dependences of the MFCA amplitude and phase on the modulation frequency at several pump-to-probe separations is theoretically compared with that employing the dependences on the pump-to-probe separation measured at several modulation frequencies. Simulation results show that the two approaches have comparable sensitivities to the electronic transport properties of silicon wafers. As for the MFCA experiments, the frequency scan data measured at different pump-to-probe separations have higher signal-to-noise ratios and therefore should be preferable to the simultaneous determination of the multiple transport properties. |
| 语种 | 英语 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/6575]  |
| 专题 | 光电技术研究所_薄膜光学技术研究室（十一室） |
| 作者单位 | 中国科学院光电技术研究所 |
| 推荐引用方式 GB/T 7714 | Wei Li,Bincheng Li. Analysis of modulated free-carrier absorption measurement of electronic transport properties of silicon wafers[J]. Journal of Physics: Conference Series,2010,214. |
| APA | Wei Li,&Bincheng Li.(2010).Analysis of modulated free-carrier absorption measurement of electronic transport properties of silicon wafers.Journal of Physics: Conference Series,214. |
| MLA | Wei Li,et al."Analysis of modulated free-carrier absorption measurement of electronic transport properties of silicon wafers".Journal of Physics: Conference Series 214(2010). |
入库方式： OAI收割
来源：光电技术研究所
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