Measurement based on fringe reflection for testing aspheric optical axis precisely and flexibly
文献类型:期刊论文
作者 | Tang Yan; Su Xianyu; Hu Song |
刊名 | APPLIED OPTICS
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出版日期 | 2011 |
卷号 | 50期号:31页码:5944-5948 |
通讯作者 | Tang Y (Tang Yan) |
中文摘要 | A method based on fringe reflection is proposed to measure the optical axis of an aspheric mirror precisely and flexibly. In the measurement, a screen displaying a fringe pattern is moved along its normal direction, and a camera is located beside and observes the fringe pattern reflected via a tested surface. This method can test the optical axis of an aspheric mirror quantitatively before measuring the absolute hEight of the tested surface. And it can be combined with some presented methods that need to fit the aspheric mirror according to the optical axis to measure the surface. To validate the ability of this method, it is combined with one of the presented methods to measure absolute hEight of an aspheric mirror precisely and flexibly. Computer simulations and preliminary experiment validate the feasibility of this method. (C) 2011 Optical Society of America |
英文摘要 | A method based on fringe reflection is proposed to measure the optical axis of an aspheric mirror precisely and flexibly. In the measurement, a screen displaying a fringe pattern is moved along its normal direction, and a camera is located beside and observes the fringe pattern reflected via a tested surface. This method can test the optical axis of an aspheric mirror quantitatively before measuring the absolute hEight of the tested surface. And it can be combined with some presented methods that need to fit the aspheric mirror according to the optical axis to measure the surface. To validate the ability of this method, it is combined with one of the presented methods to measure absolute hEight of an aspheric mirror precisely and flexibly. Computer simulations and preliminary experiment validate the feasibility of this method. (C) 2011 Optical Society of America |
语种 | 英语 |
源URL | [http://ir.ioe.ac.cn/handle/181551/7245] ![]() |
专题 | 光电技术研究所_微电子装备总体研究室(四室) |
作者单位 | 中国科学院光电技术研究所 |
推荐引用方式 GB/T 7714 | Tang Yan,Su Xianyu,Hu Song. Measurement based on fringe reflection for testing aspheric optical axis precisely and flexibly[J]. APPLIED OPTICS,2011,50(31):5944-5948. |
APA | Tang Yan,Su Xianyu,&Hu Song.(2011).Measurement based on fringe reflection for testing aspheric optical axis precisely and flexibly.APPLIED OPTICS,50(31),5944-5948. |
MLA | Tang Yan,et al."Measurement based on fringe reflection for testing aspheric optical axis precisely and flexibly".APPLIED OPTICS 50.31(2011):5944-5948. |
入库方式: OAI收割
来源:光电技术研究所
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