中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Measurement based on fringe reflection for testing aspheric optical axis precisely and flexibly

文献类型:期刊论文

作者Tang Yan; Su Xianyu; Hu Song
刊名APPLIED OPTICS
出版日期2011
卷号50期号:31页码:5944-5948
通讯作者Tang Y (Tang Yan)
中文摘要A method based on fringe reflection is proposed to measure the optical axis of an aspheric mirror precisely and flexibly. In the measurement, a screen displaying a fringe pattern is moved along its normal direction, and a camera is located beside and observes the fringe pattern reflected via a tested surface. This method can test the optical axis of an aspheric mirror quantitatively before measuring the absolute hEight of the tested surface. And it can be combined with some presented methods that need to fit the aspheric mirror according to the optical axis to measure the surface. To validate the ability of this method, it is combined with one of the presented methods to measure absolute hEight of an aspheric mirror precisely and flexibly. Computer simulations and preliminary experiment validate the feasibility of this method. (C) 2011 Optical Society of America
英文摘要A method based on fringe reflection is proposed to measure the optical axis of an aspheric mirror precisely and flexibly. In the measurement, a screen displaying a fringe pattern is moved along its normal direction, and a camera is located beside and observes the fringe pattern reflected via a tested surface. This method can test the optical axis of an aspheric mirror quantitatively before measuring the absolute hEight of the tested surface. And it can be combined with some presented methods that need to fit the aspheric mirror according to the optical axis to measure the surface. To validate the ability of this method, it is combined with one of the presented methods to measure absolute hEight of an aspheric mirror precisely and flexibly. Computer simulations and preliminary experiment validate the feasibility of this method. (C) 2011 Optical Society of America
语种英语
源URL[http://ir.ioe.ac.cn/handle/181551/7245]  
专题光电技术研究所_微电子装备总体研究室(四室)
作者单位中国科学院光电技术研究所
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GB/T 7714
Tang Yan,Su Xianyu,Hu Song. Measurement based on fringe reflection for testing aspheric optical axis precisely and flexibly[J]. APPLIED OPTICS,2011,50(31):5944-5948.
APA Tang Yan,Su Xianyu,&Hu Song.(2011).Measurement based on fringe reflection for testing aspheric optical axis precisely and flexibly.APPLIED OPTICS,50(31),5944-5948.
MLA Tang Yan,et al."Measurement based on fringe reflection for testing aspheric optical axis precisely and flexibly".APPLIED OPTICS 50.31(2011):5944-5948.

入库方式: OAI收割

来源:光电技术研究所

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