Focal length measurement of a microlens-array by grating shearing interferometry
文献类型：期刊论文
| 作者 | Zhu, Xianchang; Hu, Song; Zhao, Lixin |
| 刊名 | Applied Optics
 |
| 出版日期 | 2014 |
| 卷号 | 53期号:29页码:6663-6669 |
| ISSN号 | 1559-128X |
| 通讯作者 | Zhu, Xianchang |
| 中文摘要 | Based on grating shearing interferometry, a simple technique is introduced for focal length measurements of a microlens-array (MLA). The measurement system is composed of a He-Ne laser, condenser, collimator, the MLA under testing, a Ronchi grating, and CCD sensor. The plane wavefront from the collimator is transformed to a spherical wavefront by the MLA, while the curvature center is at the focus. Interference stripes appear at the overlap between the zero-order and first-order diffractive patterns of the grating and are detected by the CCD sensor. By analyzing the period change of stripes, the focal length is determined after the defocus of the grating is calculated. To validate the feasibility, an experiment is performed. The measurement uncertainty is discussed and measurement accuracy was determined to be 2%. © 2014 Optical Society of America. |
| 英文摘要 | Based on grating shearing interferometry, a simple technique is introduced for focal length measurements of a microlens-array (MLA). The measurement system is composed of a He-Ne laser, condenser, collimator, the MLA under testing, a Ronchi grating, and CCD sensor. The plane wavefront from the collimator is transformed to a spherical wavefront by the MLA, while the curvature center is at the focus. Interference stripes appear at the overlap between the zero-order and first-order diffractive patterns of the grating and are detected by the CCD sensor. By analyzing the period change of stripes, the focal length is determined after the defocus of the grating is calculated. To validate the feasibility, an experiment is performed. The measurement uncertainty is discussed and measurement accuracy was determined to be 2%. © 2014 Optical Society of America. |
| 学科主题 | Microlenses - Optical instrument lenses - Shearing - Uncertainty analysis - Wavefronts |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000343160200041 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7294]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan, China |
| 推荐引用方式 GB/T 7714 | Zhu, Xianchang,Hu, Song,Zhao, Lixin. Focal length measurement of a microlens-array by grating shearing interferometry[J]. Applied Optics,2014,53(29):6663-6669. |
| APA | Zhu, Xianchang,Hu, Song,&Zhao, Lixin.(2014).Focal length measurement of a microlens-array by grating shearing interferometry.Applied Optics,53(29),6663-6669. |
| MLA | Zhu, Xianchang,et al."Focal length measurement of a microlens-array by grating shearing interferometry".Applied Optics 53.29(2014):6663-6669. |
入库方式： OAI收割
来源：光电技术研究所
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