Fabrication of circular microstructure array based on a controlled diffractive pattern
文献类型：期刊论文
| 作者 | Li, Shuhong1,2; Du, Jinglei1; Zhang, Zhiyou1; Gao, Fuhua1; Gao, Hongtao2; Du, Chunlei2 |
| 刊名 | Microelectronic Engineering
 |
| 出版日期 | 2014 |
| 卷号 | 115页码:13-15 |
| ISSN号 | 01679317 |
| 通讯作者 | Li, S. (lsh2772@scu.edu.cn) |
| 中文摘要 | Subwavelength metal circular structures have wide potential applications for the higher transmission efficiency than holes. A circular structures fabrication method is demonstrated by employing the diffraction pattern generated with some available regular structures. The inversion algorithm of the parameters of diffractive object is built from the required diffractive pattern based on the scalar diffractive theory. To validate the approach, a circular screen in array with size of 1.1 μm was designed and fabricated as mask. Finally, an annulus array with feature size of 680 nm is formed in the resist. © 2013 Elsevier B.V. All rights reserved. |
| 英文摘要 | Subwavelength metal circular structures have wide potential applications for the higher transmission efficiency than holes. A circular structures fabrication method is demonstrated by employing the diffraction pattern generated with some available regular structures. The inversion algorithm of the parameters of diffractive object is built from the required diffractive pattern based on the scalar diffractive theory. To validate the approach, a circular screen in array with size of 1.1 μm was designed and fabricated as mask. Finally, an annulus array with feature size of 680 nm is formed in the resist. © 2013 Elsevier B.V. All rights reserved. |
| 学科主题 | Lithography - Microstructure |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000330502700004 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7298]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.School of Physics, Sichuan University, Chengdu 610064, China 2.Institute of Optics and Electronics, CAS, P.O. Box 350, Chengdu 610209, China |
| 推荐引用方式 GB/T 7714 | Li, Shuhong,Du, Jinglei,Zhang, Zhiyou,et al. Fabrication of circular microstructure array based on a controlled diffractive pattern[J]. Microelectronic Engineering,2014,115:13-15. |
| APA | Li, Shuhong,Du, Jinglei,Zhang, Zhiyou,Gao, Fuhua,Gao, Hongtao,&Du, Chunlei.(2014).Fabrication of circular microstructure array based on a controlled diffractive pattern.Microelectronic Engineering,115,13-15. |
| MLA | Li, Shuhong,et al."Fabrication of circular microstructure array based on a controlled diffractive pattern".Microelectronic Engineering 115(2014):13-15. |
入库方式： OAI收割
来源：光电技术研究所
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