Scalar-Based Analysis of Phase Gratings Etched in the Micro nanofabrication Process
文献类型：期刊论文
| 作者 | Zhou, Shaolin1; Yang, Yong2; Hu, Song2; Xu, Xiangmin1 |
| 刊名 | IEEE Photonics Journal
 |
| 出版日期 | 2015 |
| 卷号 | 7期号:4页码:4900111 |
| ISSN号 | 1943-0655 |
| 通讯作者 | Zhou, Shaolin (shaolinzhou@gmail.com) |
| 中文摘要 | The diffraction characteristics of several types of phase gratings often etched on the substrate by the micro/nanofabrication techniques are analytically explored using scalar-based analysis in this paper. The process of an incident wave being reflected or transmitted by the diffraction grating is regarded as a process of modulation, and the reflectance or transmittance can be unified as the modulation index. The mechanisms of phase modulation, amplitude modulation, and the amplitude-phase hybrid modulation in different situations are discussed. Analytical results indicate that the diffraction efficiency is directly determined by the phase difference of adjacent features, i.e., the cyclically distributed ridges and grooves that induce different phase and amplitude variations. The absolute phase grating with phase difference equivalent to π has the maximum diffraction efficiency among all types of gratings. The conclusions could, in general, provide guidance for the design and micro/nanofabrication of phase gratings for many diffraction-based applications of optical metrology or imaging. © 2009-2012 IEEE. |
| 英文摘要 | The diffraction characteristics of several types of phase gratings often etched on the substrate by the micro/nanofabrication techniques are analytically explored using scalar-based analysis in this paper. The process of an incident wave being reflected or transmitted by the diffraction grating is regarded as a process of modulation, and the reflectance or transmittance can be unified as the modulation index. The mechanisms of phase modulation, amplitude modulation, and the amplitude-phase hybrid modulation in different situations are discussed. Analytical results indicate that the diffraction efficiency is directly determined by the phase difference of adjacent features, i.e., the cyclically distributed ridges and grooves that induce different phase and amplitude variations. The absolute phase grating with phase difference equivalent to pai has the maximum diffraction efficiency among all types of gratings. The conclusions could, in general, provide guidance for the design and micro/nanofabrication of phase gratings for many diffraction-based applications of optical metrology or imaging. © 2009-2012 IEEE. |
| 学科主题 | Amplitude modulation - Diffraction - Diffraction efficiency - Efficiency - Modulation - Phase modulation |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000361069900025 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7322]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.School of Electronic and Information Engineering, South China University of Technology, Guangzhou, China 2.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China |
| 推荐引用方式 GB/T 7714 | Zhou, Shaolin,Yang, Yong,Hu, Song,et al. Scalar-Based Analysis of Phase Gratings Etched in the Micro nanofabrication Process[J]. IEEE Photonics Journal,2015,7(4):4900111. |
| APA | Zhou, Shaolin,Yang, Yong,Hu, Song,&Xu, Xiangmin.(2015).Scalar-Based Analysis of Phase Gratings Etched in the Micro nanofabrication Process.IEEE Photonics Journal,7(4),4900111. |
| MLA | Zhou, Shaolin,et al."Scalar-Based Analysis of Phase Gratings Etched in the Micro nanofabrication Process".IEEE Photonics Journal 7.4(2015):4900111. |
入库方式： OAI收割
来源：光电技术研究所
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