Moiré-Based Interferometry for Magnification Calibration of Bitelecentric Lens System
文献类型：期刊论文
| 作者 | Zhou, Yi1,2; Zhu, Jiangping3; Deng, Qinyuan1,2; Liu, Junbo1,2; Si, Xinchun1,2; Hu, Song1 |
| 刊名 | IEEE Photonics Journal
 |
| 出版日期 | 2015 |
| 卷号 | 7期号:6页码:3900311 |
| ISSN号 | 1943-0655 |
| 通讯作者 | Zhou, Yi (alanzhouyi@163.com) |
| 中文摘要 | The bitelecentric lens system is widely used in many domains, such as 3-D measurements and tube inspection. The magnification calibration for such a system is a crucial problem for its further application in achieving precise measurements. However, it is difficult to obtain an accurate result using a general magnification calibration method. In this paper, the Moiré-based interferometry is demonstrated to accurately calibrate the magnification of bitelecentric lens system that increases the speed and precision of the measurement. Two special grating marks containing upper and lower parts with slightly different periods are designed to generate Moiré fringes. By analyzing the finally obtained Moiré fringes, the magnification could be determined through Fourier-based phase analysis and a phase unwrapping algorithm, and the further the deviation is from the theoretical value, the more obvious the differences between upper and lower periods will be. Both simulations and experiments are conducted to verify the feasibility and effectiveness of the proposed approach. Results indicate that the magnification could be calibrated at the accuracy of 0.4% with extraordinary sensitivity. © 2009-2012 IEEE. |
| 英文摘要 | The bitelecentric lens system is widely used in many domains, such as 3-D measurements and tube inspection. The magnification calibration for such a system is a crucial problem for its further application in achieving precise measurements. However, it is difficult to obtain an accurate result using a general magnification calibration method. In this paper, the Moiré-based interferometry is demonstrated to accurately calibrate the magnification of bitelecentric lens system that increases the speed and precision of the measurement. Two special grating marks containing upper and lower parts with slightly different periods are designed to generate Moiré fringes. By analyzing the finally obtained Moiré fringes, the magnification could be determined through Fourier-based phase analysis and a phase unwrapping algorithm, and the further the deviation is from the theoretical value, the more obvious the differences between upper and lower periods will be. Both simulations and experiments are conducted to verify the feasibility and effectiveness of the proposed approach. Results indicate that the magnification could be calibrated at the accuracy of 0.4% with extraordinary sensitivity. © 2009-2012 IEEE. |
| 学科主题 | Calibration |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000367248500019 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7323]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China 2.University of Chinese Academy of Sciences, Beijing, China 3.School of Computer Science and Technology, Sichuan University, Chengdu, China |
| 推荐引用方式 GB/T 7714 | Zhou, Yi,Zhu, Jiangping,Deng, Qinyuan,et al. Moiré-Based Interferometry for Magnification Calibration of Bitelecentric Lens System[J]. IEEE Photonics Journal,2015,7(6):3900311. |
| APA | Zhou, Yi,Zhu, Jiangping,Deng, Qinyuan,Liu, Junbo,Si, Xinchun,&Hu, Song.(2015).Moiré-Based Interferometry for Magnification Calibration of Bitelecentric Lens System.IEEE Photonics Journal,7(6),3900311. |
| MLA | Zhou, Yi,et al."Moiré-Based Interferometry for Magnification Calibration of Bitelecentric Lens System".IEEE Photonics Journal 7.6(2015):3900311. |
入库方式： OAI收割
来源：光电技术研究所
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