One exposure processing to fabricate spiral phase plate with continuous surface
文献类型：期刊论文
| 作者 | Shi, Lifang; Zhang, Zhiyou; Cao, Axiu; Luo, Xue; Deng, Qiling |
| 刊名 | Optics Express
 |
| 出版日期 | 2015 |
| 卷号 | 23期号:7页码:8620-8629 |
| ISSN号 | 1094-4087 |
| 通讯作者 | Deng, QL (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China. |
| 中文摘要 | An economical method for fabricating spiral phase plate (SPP) with continuous surface is proposed in this paper. We use an interval to quantize a three dimensional surface of an SPP into two dimensional bars to form a binary mask. The exposure dose can be precisely distributed through this mask in the exposure process. We discuss the select criterion of the quantization interval and the fabricating processes of SPP in detail. In the results, we present the fabrication of four kinds of high quality SPPs with different topological charges. The morphology analysis and the corresponding optical measurements verify the reliability of our fabrication method. (C)2015 Optical Society of America |
| 英文摘要 | An economical method for fabricating spiral phase plate (SPP) with continuous surface is proposed in this paper. We use an interval to quantize a three dimensional surface of an SPP into two dimensional bars to form a binary mask. The exposure dose can be precisely distributed through this mask in the exposure process. We discuss the select criterion of the quantization interval and the fabricating processes of SPP in detail. In the results, we present the fabrication of four kinds of high quality SPPs with different topological charges. The morphology analysis and the corresponding optical measurements verify the reliability of our fabrication method. (C)2015 Optical Society of America |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000352290000065 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7339]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 1.[Shi, Lifang 2.Cao, Axiu 3.Luo, Xue 4.Deng, Qiling] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Sichuan, Peoples R China 5.[Zhang, Zhiyou] Sichuan Univ, Minist Educ, Key Lab High Energy Dens Phys & Technol, Chengdu 610064, Sichuan, Peoples R China |
| 推荐引用方式 GB/T 7714 | Shi, Lifang,Zhang, Zhiyou,Cao, Axiu,et al. One exposure processing to fabricate spiral phase plate with continuous surface[J]. Optics Express,2015,23(7):8620-8629. |
| APA | Shi, Lifang,Zhang, Zhiyou,Cao, Axiu,Luo, Xue,&Deng, Qiling.(2015).One exposure processing to fabricate spiral phase plate with continuous surface.Optics Express,23(7),8620-8629. |
| MLA | Shi, Lifang,et al."One exposure processing to fabricate spiral phase plate with continuous surface".Optics Express 23.7(2015):8620-8629. |
入库方式： OAI收割
来源：光电技术研究所
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