A practical nanofabrication method: surface plasmon polaritons interference lithography based on backside-exposure technique
文献类型：期刊论文
| 作者 | Mingyang He; Zhiyou Zhang; Sha Shi; Jinglei Du; Xupeng Li; Shuhong Li; Wenying Ma |
| 刊名 | Optics Express
 |
| 出版日期 | 2010 |
| 卷号 | 18期号:15页码:15975-15980 |
| 通讯作者 | Mingyang He |
| 中文摘要 | For the experiments of surface plasmon polaritons (SPPs) interference lithography based on attenuated total reflection-coupling mode to be done conveniently, we introduce a backside-exposure technique in this paper. The physical mechanisms of SPPs interference with the backside -exposure method are studied and the interference fringes with feature size below 65 nm are experimentally obtained. The technique can be used to fabricate nanostructures conveniently with large area, and avoids the difficulties for seeking high refractive prism and matching fluid. |
| 英文摘要 | For the experiments of surface plasmon polaritons (SPPs) interference lithography based on attenuated total reflection-coupling mode to be done conveniently, we introduce a backside-exposure technique in this paper. The physical mechanisms of SPPs interference with the backside -exposure method are studied and the interference fringes with feature size below 65 nm are experimentally obtained. The technique can be used to fabricate nanostructures conveniently with large area, and avoids the difficulties for seeking high refractive prism and matching fluid. |
| 语种 | 英语 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/6713]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 中国科学院光电技术研究所 |
| 推荐引用方式 GB/T 7714 | Mingyang He,Zhiyou Zhang,Sha Shi,et al. A practical nanofabrication method: surface plasmon polaritons interference lithography based on backside-exposure technique[J]. Optics Express,2010,18(15):15975-15980. |
| APA | Mingyang He.,Zhiyou Zhang.,Sha Shi.,Jinglei Du.,Xupeng Li.,...&Wenying Ma.(2010).A practical nanofabrication method: surface plasmon polaritons interference lithography based on backside-exposure technique.Optics Express,18(15),15975-15980. |
| MLA | Mingyang He,et al."A practical nanofabrication method: surface plasmon polaritons interference lithography based on backside-exposure technique".Optics Express 18.15(2010):15975-15980. |
入库方式： OAI收割
来源：光电技术研究所
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