Novel electrostatic bidirectional-translation MEMS deformable mirror
文献类型：期刊论文
| 作者 | Yao, Jun1; Tao, Feng-Gang1,2; Ren, Hao1,2; Wang, Wei-Min1,2; Zhuang, Xu-Ye1 |
| 刊名 | Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering
 |
| 出版日期 | 2012 |
| 卷号 | 10期号:4页码:313-317 |
| ISSN号 | 16726030 |
| 通讯作者 | Tao, F.-G. (tfg86@mail.ustc.edu.cn) |
| 中文摘要 | A novel electrostatic micro-electro-mechanical-system (MEMS) deformable mirror with the ability of bidirectional translation was presented. The micro mirror consisted of three parts: a central bottom electrode, four electrostatic lever-actuators and an upper electrode, i.e. a mirror plate. The mirror can operate in upward and downward modes. In the upward mode, the displacement of the mirror plate was amplified by using four levers; while in the downward mode, a nonlinear spring method was adopted to extend the translation range. The micro mirror was fabricated by using surface micromachining process and tested by a white light interferometer. The experimental results showed that the mirror could move upward about 1.1 μm at 31 V, and downward 1.1 μm at 6 V. The total displacement of the mirror plate reached 2.2 μm, about 3 times as large as the stroke of traditional mirrors with the same fabrication process. |
| 英文摘要 | A novel electrostatic micro-electro-mechanical-system (MEMS) deformable mirror with the ability of bidirectional translation was presented. The micro mirror consisted of three parts: a central bottom electrode, four electrostatic lever-actuators and an upper electrode, i.e. a mirror plate. The mirror can operate in upward and downward modes. In the upward mode, the displacement of the mirror plate was amplified by using four levers; while in the downward mode, a nonlinear spring method was adopted to extend the translation range. The micro mirror was fabricated by using surface micromachining process and tested by a white light interferometer. The experimental results showed that the mirror could move upward about 1.1 μm at 31 V, and downward 1.1 μm at 6 V. The total displacement of the mirror plate reached 2.2 μm, about 3 times as large as the stroke of traditional mirrors with the same fabrication process. |
| 学科主题 | Actuators - Electrostatic actuators - Electrostatics - MEMS |
| 收录类别 | EI |
| 语种 | 英语 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/6798]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 1.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2.Graduate University of Chinese Academy of Sciences, Beijing 100039, China |
| 推荐引用方式 GB/T 7714 | Yao, Jun,Tao, Feng-Gang,Ren, Hao,et al. Novel electrostatic bidirectional-translation MEMS deformable mirror[J]. Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering,2012,10(4):313-317. |
| APA | Yao, Jun,Tao, Feng-Gang,Ren, Hao,Wang, Wei-Min,&Zhuang, Xu-Ye.(2012).Novel electrostatic bidirectional-translation MEMS deformable mirror.Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering,10(4),313-317. |
| MLA | Yao, Jun,et al."Novel electrostatic bidirectional-translation MEMS deformable mirror".Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering 10.4(2012):313-317. |
入库方式： OAI收割
来源：光电技术研究所
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