中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Design and Theoretical Analyses of Tip-Insulator-Metal Structure with Bottom-Up Light Illumination: Formations of Elongated Symmetrical Plasmonic Hot Spot at Sub-10 nm Resolution

文献类型:期刊论文

作者Zhou, Jie; Wang, Changtao; Zhao, Zeyu; Wang, Yanqin; He, Jiayu; Tao, Xing; Luo, Xiangang
刊名PLASMONICS
出版日期2013
卷号8期号:2页码:1073-1078
ISSN号1557-1955
通讯作者Luo, XG (reprint author), Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, POB 350, Chengdu 610209, Peoples R China.
中文摘要Ag tip-insulator-metal structure with bottom-up light illumination is proposed and theoretically analyzed. It shows that there is a strong plasmonic coupling between Ag tip and metallic surface. Different from oblique light illumination, this novel design possesses unique advantages of symmetrical hot spot profile and enlarged depth of focus at a sub-10-nm spatial resolution. Influences of tip size, insulator, and metallic layer thickness are studied. It is found that the metallic layer thickness greatly affects the plasmonic hot spot quality. Meanwhile, the thickness of photoresist plays a major role in controlling light spot size, indicating that much higher resolution can be achieved for the Ag tips with large curvature radius.
英文摘要Ag tip-insulator-metal structure with bottom-up light illumination is proposed and theoretically analyzed. It shows that there is a strong plasmonic coupling between Ag tip and metallic surface. Different from oblique light illumination, this novel design possesses unique advantages of symmetrical hot spot profile and enlarged depth of focus at a sub-10-nm spatial resolution. Influences of tip size, insulator, and metallic layer thickness are studied. It is found that the metallic layer thickness greatly affects the plasmonic hot spot quality. Meanwhile, the thickness of photoresist plays a major role in controlling light spot size, indicating that much higher resolution can be achieved for the Ag tips with large curvature radius.
学科主题Plasmonics; Surface plasmons; Nano-lithography; Laser material processing
收录类别SCI
语种英语
WOS记录号WOS:000320445700119
源URL[http://ir.ioe.ac.cn/handle/181551/6831]  
专题光电技术研究所_微细加工光学技术国家重点实验室(开放室)
作者单位1.[Zhou, Jie
2.Wang, Changtao
3.Zhao, Zeyu
4.Wang, Yanqin
5.He, Jiayu
6.Tao, Xing
7.Luo, Xiangang] Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China
推荐引用方式
GB/T 7714
Zhou, Jie,Wang, Changtao,Zhao, Zeyu,et al. Design and Theoretical Analyses of Tip-Insulator-Metal Structure with Bottom-Up Light Illumination: Formations of Elongated Symmetrical Plasmonic Hot Spot at Sub-10 nm Resolution[J]. PLASMONICS,2013,8(2):1073-1078.
APA Zhou, Jie.,Wang, Changtao.,Zhao, Zeyu.,Wang, Yanqin.,He, Jiayu.,...&Luo, Xiangang.(2013).Design and Theoretical Analyses of Tip-Insulator-Metal Structure with Bottom-Up Light Illumination: Formations of Elongated Symmetrical Plasmonic Hot Spot at Sub-10 nm Resolution.PLASMONICS,8(2),1073-1078.
MLA Zhou, Jie,et al."Design and Theoretical Analyses of Tip-Insulator-Metal Structure with Bottom-Up Light Illumination: Formations of Elongated Symmetrical Plasmonic Hot Spot at Sub-10 nm Resolution".PLASMONICS 8.2(2013):1073-1078.

入库方式: OAI收割

来源:光电技术研究所

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