A bi-directional out-of-plane actuator by electrostatic force
文献类型：期刊论文
| 作者 | Ren, Hao1; Wang, Weimin2; Tao, Fenggang2; Yao, Jun2 |
| 刊名 | Micromachines
 |
| 出版日期 | 2013 |
| 卷号 | 4期号:4页码:431-443 |
| 通讯作者 | Yao, J. (junyao@ioe.ac.cn) |
| 中文摘要 | Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common "pull-in" instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is further enlarged. The implications of changing the actuator's physical dimensions are discussed, along with the two-layer polysilicon surface microfabrication process used to fabricate such an actuator. The static characteristics of the out-of-plane displacement versus the voltage of both modes are tested, and displacements of 1.4 μm and 0.63 μm are obtained at 130 V and 15 V, respectively. Therefore, a total stroke of 2.03 μm is achieved, more than 3 fold that of the electrostatic attractive mode, making this actuator useful in optical Micro-Electro-Mechanical Systems (MEMS) and Radio Frequency (RF) MEMS applications. © 2013 by the authors; licensee MDPI, Basel, Switzerland. |
| 英文摘要 | Presented in this paper is a bi-directional out-of-plane actuator which combines the merits of the electrostatic repulsive principle and the electrostatic attractive principle. By taking advantage of the electrostatic repulsive mode, the common "pull-in" instability can be lessened to enlarge the displacement, and by applying the electrostatic attractive mode, the out-of-plane displacement is further enlarged. The implications of changing the actuator's physical dimensions are discussed, along with the two-layer polysilicon surface microfabrication process used to fabricate such an actuator. The static characteristics of the out-of-plane displacement versus the voltage of both modes are tested, and displacements of 1.4 μm and 0.63 μm are obtained at 130 V and 15 V, respectively. Therefore, a total stroke of 2.03 μm is achieved, more than 3 fold that of the electrostatic attractive mode, making this actuator useful in optical Micro-Electro-Mechanical Systems (MEMS) and Radio Frequency (RF) MEMS applications. © 2013 by the authors; licensee MDPI, Basel, Switzerland. |
| 学科主题 | Actuators - Adaptive optics - Electrostatic force - MEMS - Microfabrication |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000329707400006 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/6832]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 1.School of Electrical Computer and Energy Engineering, Arizona State University, Tempe, AZ 85287, United States 2.State Key Lab of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China |
| 推荐引用方式 GB/T 7714 | Ren, Hao,Wang, Weimin,Tao, Fenggang,et al. A bi-directional out-of-plane actuator by electrostatic force[J]. Micromachines,2013,4(4):431-443. |
| APA | Ren, Hao,Wang, Weimin,Tao, Fenggang,&Yao, Jun.(2013).A bi-directional out-of-plane actuator by electrostatic force.Micromachines,4(4),431-443. |
| MLA | Ren, Hao,et al."A bi-directional out-of-plane actuator by electrostatic force".Micromachines 4.4(2013):431-443. |
入库方式： OAI收割
来源：光电技术研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。