A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction
文献类型：期刊论文
| 作者 | Wang, Weimin1,2,3; Hu, Fangrong4; Wang, Qiang1; Qiu, Chuankai1; Chen, Zexiang2; Yao, Jun1 |
| 刊名 | AIP Advances
 |
| 出版日期 | 2014 |
| 卷号 | 4期号:3页码:031317 |
| 中文摘要 | A 45-element continuous facesheet surface micromachined deformable mirror (DM) is presented and is fabricated using the PolyMUMPs multi-user micro-electro-mechanical system processes. The effects of the structural parameters on the characteristics of the DM, such as its stroke, frequency and actuator coupling, are analyzed. In addition, the DM design has also been verified through experimental testing. This DM prototype has a surface figure of 0.5 μm and a fill factor of 95%. The DM can provide a 0.6 μm stroke with 5.9% actuator coupling. A static aberration correction based on this DM is also demonstrated, which acts as a reference for the potential adaptive optics (AO) applications of the device. © Author(s) 2014. |
| 英文摘要 | A 45-element continuous facesheet surface micromachined deformable mirror (DM) is presented and is fabricated using the PolyMUMPs multi-user micro-electro-mechanical system processes. The effects of the structural parameters on the characteristics of the DM, such as its stroke, frequency and actuator coupling, are analyzed. In addition, the DM design has also been verified through experimental testing. This DM prototype has a surface figure of 0.5 μm and a fill factor of 95%. The DM can provide a 0.6 μm stroke with 5.9% actuator coupling. A static aberration correction based on this DM is also demonstrated, which acts as a reference for the potential adaptive optics (AO) applications of the device. © Author(s) 2014. |
| 学科主题 | Aberrations - MEMS |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000334213700018 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/6848]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 1.State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2.School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu 610054, China 3.University of Chinese Academy of Sciences, Beijing 100049, China 4.College of Electronic Engineering and Automatization, Guilin University of Electronic Technology, Guilin 541004, China |
| 推荐引用方式 GB/T 7714 | Wang, Weimin,Hu, Fangrong,Wang, Qiang,et al. A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction[J]. AIP Advances,2014,4(3):031317. |
| APA | Wang, Weimin,Hu, Fangrong,Wang, Qiang,Qiu, Chuankai,Chen, Zexiang,&Yao, Jun.(2014).A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction.AIP Advances,4(3),031317. |
| MLA | Wang, Weimin,et al."A 45-element continuous facesheet surface micromachined deformable mirror for optical aberration correction".AIP Advances 4.3(2014):031317. |
入库方式： OAI收割
来源：光电技术研究所
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