Effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films
文献类型：期刊论文
| 作者 | Tang, Ping; Qiu, Chuankai; He, Jingjing; Zhang, Tiejun; Feng, Xiao; Luo, Xiangang |
| 刊名 | Journal of Materials Science: Materials in Electronics
 |
| 出版日期 | 2014 |
| 卷号 | 25期号:10页码:4369-4374 |
| ISSN号 | 09574522 |
| 通讯作者 | Luo, Xiangang |
| 中文摘要 | The effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films is investigated. X-ray diffraction patterns show that the crystallinity of the films is enhanced with the increasing of substrate temperature. Comparing the SEM images, both the particle size and density are increased at a higher deposition temperature. The lowest sheet resistance of 8.43 Ω/ is obtained at the substrate temperature of 350 °C. In addition, the average optical transmittance of the three films reaches up to 85 % in the visible range. The absorption coefficient is the lowest at 350 °C. The band gap increases from 3.36 to 3.61 eV while the electrical resistivity of SnO2:F thin films decreases from 8.51 × 10−3 to 9.86 × 10−4 Ω cm as elevating the substrate temperature from 250 to 350 °C. |
| 英文摘要 | The effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films is investigated. X-ray diffraction patterns show that the crystallinity of the films is enhanced with the increasing of substrate temperature. Comparing the SEM images, both the particle size and density are increased at a higher deposition temperature. The lowest sheet resistance of 8.43 Ω/ is obtained at the substrate temperature of 350 °C. In addition, the average optical transmittance of the three films reaches up to 85 % in the visible range. The absorption coefficient is the lowest at 350 °C. The band gap increases from 3.36 to 3.61 eV while the electrical resistivity of SnO2:F thin films decreases from 8.51 × 10−3 to 9.86 × 10−4 Ω cm as elevating the substrate temperature from 250 to 350 °C. |
| 学科主题 | Deposits - Energy gap - Particle size - Thin films - X ray diffraction |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000342157500027 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/6860]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, P.O. Box 350, Chengdu, China |
| 推荐引用方式 GB/T 7714 | Tang, Ping,Qiu, Chuankai,He, Jingjing,et al. Effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films[J]. Journal of Materials Science: Materials in Electronics,2014,25(10):4369-4374. |
| APA | Tang, Ping,Qiu, Chuankai,He, Jingjing,Zhang, Tiejun,Feng, Xiao,&Luo, Xiangang.(2014).Effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films.Journal of Materials Science: Materials in Electronics,25(10),4369-4374. |
| MLA | Tang, Ping,et al."Effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films".Journal of Materials Science: Materials in Electronics 25.10(2014):4369-4374. |
入库方式： OAI收割
来源：光电技术研究所
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