Elongating the Air Working Distance of Near-Field Plasmonic Lens by Surface Plasmon Illumination
文献类型：期刊论文
| 作者 | Zhang, Wei; Wang, Hao; Wang, Changtao; Yao, Na; Zhao, Zeyu; Wang, Yanqin; Gao, Ping; Luo, Yunfei; Du, Wenjuan; Jiang, Bo |
| 刊名 | PLASMONICS
 |
| 出版日期 | 2015 |
| 卷号 | 10期号:1页码:51-56 |
| ISSN号 | 1557-1955 |
| 通讯作者 | Luo, XG (reprint author), Chinese Acad Sci, State Key Lab Opt Technol Nanofabricat & Microeng, Inst Opt & Elect, POB 350, Chengdu 610209, Peoples R China. |
| 中文摘要 | A method is proposed and demonstrated to elongate the air working distance of near-field plasmonic lens with deep subwavelength resolution. It is done by employing surface plasmon illumination (SPI) with a high transverse wavevector and a plasmonic lens with a metal-dielectric-metal structure. Specially designed SPI source with subwavelength grating and multiple metal-dielectric films delivers the shifted spatial spectra components of mask patterns, which help to enhance plasmonic lens optical transfer ability of patterns' information even with a large air working distance. Moreover, a metal reflector serves to modulate the magnitude of the tangential and normal electric field components in the imaging region and brings the considerable improvement of imaging quality. Numerical simulations show that the maximum air working distance could reach 60 for 32 nm half-pitch resolution at 365 nm wavelength about six times that for the conventional superlens under normal illumination (NI). An approximate model of the air working distance elongation under SPI is given and agrees well with simulations. |
| 英文摘要 | A method is proposed and demonstrated to elongate the air working distance of near-field plasmonic lens with deep subwavelength resolution. It is done by employing surface plasmon illumination (SPI) with a high transverse wavevector and a plasmonic lens with a metal-dielectric-metal structure. Specially designed SPI source with subwavelength grating and multiple metal-dielectric films delivers the shifted spatial spectra components of mask patterns, which help to enhance plasmonic lens optical transfer ability of patterns' information even with a large air working distance. Moreover, a metal reflector serves to modulate the magnitude of the tangential and normal electric field components in the imaging region and brings the considerable improvement of imaging quality. Numerical simulations show that the maximum air working distance could reach 60 for 32 nm half-pitch resolution at 365 nm wavelength about six times that for the conventional superlens under normal illumination (NI). An approximate model of the air working distance elongation under SPI is given and agrees well with simulations. |
| 学科主题 | Surface plasmons; Image formation theory; Superresolution; Nanolithography |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000348346300008 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/6906]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 1.[Zhang, Wei 2.Wang, Changtao 3.Yao, Na 4.Zhao, Zeyu 5.Wang, Yanqin 6.Gao, Ping 7.Luo, Yunfei 8.Du, Wenjuan 9.Luo, Xiangang] Chinese Acad Sci, State Key Lab Opt Technol Nanofabricat & Microeng, Inst Opt & Elect, Chengdu 610209, Peoples R China 10.[Wang, Hao] Univ Elect Sci & Technol China, Sch Mechatron Engn, Chengdu 611731, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhang, Wei,Wang, Hao,Wang, Changtao,et al. Elongating the Air Working Distance of Near-Field Plasmonic Lens by Surface Plasmon Illumination[J]. PLASMONICS,2015,10(1):51-56. |
| APA | Zhang, Wei.,Wang, Hao.,Wang, Changtao.,Yao, Na.,Zhao, Zeyu.,...&Luo, Xiangang.(2015).Elongating the Air Working Distance of Near-Field Plasmonic Lens by Surface Plasmon Illumination.PLASMONICS,10(1),51-56. |
| MLA | Zhang, Wei,et al."Elongating the Air Working Distance of Near-Field Plasmonic Lens by Surface Plasmon Illumination".PLASMONICS 10.1(2015):51-56. |
入库方式： OAI收割
来源：光电技术研究所
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