An electrostatically actuated MEMS tilting mirror based on self-assembly
文献类型：期刊论文
| 作者 | Wang, Qiang1,2; Wang, Weimin1,2; Qiu, Chuankai1; Yu, Junsheng2 |
| 刊名 | Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams
 |
| 出版日期 | 2015 |
| 卷号 | 27期号:2页码:024127 |
| ISSN号 | 1001-4322 |
| 通讯作者 | Qiu, Chuankai |
| 中文摘要 | An electrostatically actuated microelectromechanical systems (MEMS) tilting mirror based on self-assembly is proposed and fabricated using the poly multi-user MEMS process (PolyMUMPs). The tilting mirror is composed of one central mirror, two torsional springs and two bimorph suspension beams for self-assembly. The central mirror can be lifted off the substrate due to residual stresses in Au-polysilicon bimorph suspension beams. Thermal anneal technique is employed to increase the residual stress in Au film. The structure is optimized by Finite Element Analysis (FEA) and experimentally verified. The torsion angle of the tilting mirror gets to 3.6° with 200 thermal anneal. The tilting mirror has potential to be implemented for mirco-opto-electro-mechanical systems (MOEMS). ©, 2015, Editorial Office of High Power Laser and Particle Beams. All right reserved. |
| 英文摘要 | An electrostatically actuated microelectromechanical systems (MEMS) tilting mirror based on self-assembly is proposed and fabricated using the poly multi-user MEMS process (PolyMUMPs). The tilting mirror is composed of one central mirror, two torsional springs and two bimorph suspension beams for self-assembly. The central mirror can be lifted off the substrate due to residual stresses in Au-polysilicon bimorph suspension beams. Thermal anneal technique is employed to increase the residual stress in Au film. The structure is optimized by Finite Element Analysis (FEA) and experimentally verified. The torsion angle of the tilting mirror gets to 3.6° with 200 thermal anneal. The tilting mirror has potential to be implemented for mirco-opto-electro-mechanical systems (MOEMS). ©, 2015, Editorial Office of High Power Laser and Particle Beams. All right reserved. |
| 学科主题 | Electromechanical devices - Electrostatic actuators - Finite element method - Gold - MEMS - Mirrors - Residual stresses |
| 收录类别 | EI |
| 语种 | 英语 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/6908]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 1.State Key Laboratory of Optical Technologies on Nano-Fabrication and Micro-Engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China 2.School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu, China |
| 推荐引用方式 GB/T 7714 | Wang, Qiang,Wang, Weimin,Qiu, Chuankai,et al. An electrostatically actuated MEMS tilting mirror based on self-assembly[J]. Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams,2015,27(2):024127. |
| APA | Wang, Qiang,Wang, Weimin,Qiu, Chuankai,&Yu, Junsheng.(2015).An electrostatically actuated MEMS tilting mirror based on self-assembly.Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams,27(2),024127. |
| MLA | Wang, Qiang,et al."An electrostatically actuated MEMS tilting mirror based on self-assembly".Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams 27.2(2015):024127. |
入库方式： OAI收割
来源：光电技术研究所
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