中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Absolute interferometric shift-rotation method with pixel-level spatial frequency resolution

文献类型:期刊论文

作者Song, Weihong1,2; Hou, Xi1; Wu, Fan1; Wan, Yongjian1
刊名Optics and Lasers in Engineering
出版日期2014
卷号54页码:68-72
ISSN号01438166
通讯作者Song, W. (songscu@163.com)
中文摘要Absolute interferometric testing method of shift-rotation in a Fizeau interferometer is effective in optical surface metrology with high accuracy and has been developed for decades. A pixel-level spatial frequency solution of interferometric shift-rotation method is presented in the manuscript. It requires a 90 rotational measurement and at least two translational measurements with different translations in the x and y directions besides a measurement at an original confocal position (0). With the well-organized absolute procedures, the absolute surface deviation of the test and reference surface can be obtained accurately with pixel-level spatial frequency resolution. As a result, the absolute results of the method contain much more mid-to high spatial frequency information and it is useful to directly detect the defects (dusts, pits) of the test and reference surfaces. No orthogonal polynomials fitting (such as Zernike polynomials) and interpolations are required in the calculation, and the absolute results can be guaranteed with high accuracy. Experimental absolute results of flat surfaces are given. © 2013 Elsevier Ltd.
英文摘要Absolute interferometric testing method of shift-rotation in a Fizeau interferometer is effective in optical surface metrology with high accuracy and has been developed for decades. A pixel-level spatial frequency solution of interferometric shift-rotation method is presented in the manuscript. It requires a 90 rotational measurement and at least two translational measurements with different translations in the x and y directions besides a measurement at an original confocal position (0). With the well-organized absolute procedures, the absolute surface deviation of the test and reference surface can be obtained accurately with pixel-level spatial frequency resolution. As a result, the absolute results of the method contain much more mid-to high spatial frequency information and it is useful to directly detect the defects (dusts, pits) of the test and reference surfaces. No orthogonal polynomials fitting (such as Zernike polynomials) and interpolations are required in the calculation, and the absolute results can be guaranteed with high accuracy. Experimental absolute results of flat surfaces are given. © 2013 Elsevier Ltd.
学科主题Laser optics - Pixels - Rotation - Surface measurement
收录类别SCI ; EI
语种英语
WOS记录号WOS:000328720700011
源URL[http://ir.ioe.ac.cn/handle/181551/7032]  
专题光电技术研究所_先光中心
作者单位1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China
2.University of Chinese Academy of Sciences, Beijing 100039, China
推荐引用方式
GB/T 7714
Song, Weihong,Hou, Xi,Wu, Fan,et al. Absolute interferometric shift-rotation method with pixel-level spatial frequency resolution[J]. Optics and Lasers in Engineering,2014,54:68-72.
APA Song, Weihong,Hou, Xi,Wu, Fan,&Wan, Yongjian.(2014).Absolute interferometric shift-rotation method with pixel-level spatial frequency resolution.Optics and Lasers in Engineering,54,68-72.
MLA Song, Weihong,et al."Absolute interferometric shift-rotation method with pixel-level spatial frequency resolution".Optics and Lasers in Engineering 54(2014):68-72.

入库方式: OAI收割

来源:光电技术研究所

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