Absolute calibration for Fizeau interferometer with the global optimized shift-rotation method
文献类型:期刊论文
作者 | Song, Weihong1,2; Li, Shifang1; Hou, Xi1; Wu, Fan1; Zhao, Wenchuan1; Wan, Yongjian1 |
刊名 | Optics and Lasers in Engineering
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出版日期 | 2014 |
卷号 | 54页码:49-54 |
ISSN号 | 01438166 |
通讯作者 | Song, W. (songscu@163.com) |
中文摘要 | We present an absolute calibration method for Fizeau interferometer with global optimized shift-rotation, which requires rotational and translational measurements. With a data matching method to decrease the alignment error of rotations and translations, the accuracy can be guaranteed. The global optimized shift-rotation method can obtain the surface deviation accurately of both the reference and test surfaces in terms of Zernike polynomials. Experiments have been implemented to verify the validity of the absolute calibration, and the results show that the reference surface deviation agrees well with the calibration result of conventional two-sphere method. Simulations were performed to evaluate the errors introduced by rotations and translations. © 2013 Elsevier Ltd. |
英文摘要 | We present an absolute calibration method for Fizeau interferometer with global optimized shift-rotation, which requires rotational and translational measurements. With a data matching method to decrease the alignment error of rotations and translations, the accuracy can be guaranteed. The global optimized shift-rotation method can obtain the surface deviation accurately of both the reference and test surfaces in terms of Zernike polynomials. Experiments have been implemented to verify the validity of the absolute calibration, and the results show that the reference surface deviation agrees well with the calibration result of conventional two-sphere method. Simulations were performed to evaluate the errors introduced by rotations and translations. © 2013 Elsevier Ltd. |
学科主题 | Calibration - Interferometry - Laser optics - Optimization - Surface measurement - Translation (languages) |
收录类别 | SCI ; EI |
语种 | 英语 |
WOS记录号 | WOS:000328720700008 |
源URL | [http://ir.ioe.ac.cn/handle/181551/7033] ![]() |
专题 | 光电技术研究所_先光中心 |
作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China 2.University of Chinese Academy of Sciences, Beijing 100039, China |
推荐引用方式 GB/T 7714 | Song, Weihong,Li, Shifang,Hou, Xi,et al. Absolute calibration for Fizeau interferometer with the global optimized shift-rotation method[J]. Optics and Lasers in Engineering,2014,54:49-54. |
APA | Song, Weihong,Li, Shifang,Hou, Xi,Wu, Fan,Zhao, Wenchuan,&Wan, Yongjian.(2014).Absolute calibration for Fizeau interferometer with the global optimized shift-rotation method.Optics and Lasers in Engineering,54,49-54. |
MLA | Song, Weihong,et al."Absolute calibration for Fizeau interferometer with the global optimized shift-rotation method".Optics and Lasers in Engineering 54(2014):49-54. |
入库方式: OAI收割
来源:光电技术研究所
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