Surface accuracy analysis of active stressed lap based on structure function
文献类型：期刊论文
| 作者 | Zhao, Hongshen; Fan, Bin; Li, Xiaojin; Zeng, Zhige |
| 刊名 | OPTICAL REVIEW
 |
| 出版日期 | 2015 |
| 卷号 | 22期号:1页码:52-57 |
| ISSN号 | 1340-6000 |
| 通讯作者 | Zhao, HS (reprint author), Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China. |
| 中文摘要 | In grinding and polishing of big mirrors using active stressed lap, lap surface accuracy restricts mirror accuracy and processing efficiency chiefly. Lap surface error, which is the mismatch between the mirror and the lap, causes partial pressure concentration and poor efficiency in grinding or polishing. Different from surface representation of active stressed lap using PV and RMS, structure function could describe average variance over all regions on lap in a given separation. This paper illustrates an efficient technique for representing active stressed lap surface error using structure function and relating bending model to the representation. Example of this procedure is described and results show that this method could represent lap surface exactly; meanwhile the surface accuracy after compensating residual error caused by lap sag could achieve allowable error specification for big mirror manufacturing. |
| 英文摘要 | In grinding and polishing of big mirrors using active stressed lap, lap surface accuracy restricts mirror accuracy and processing efficiency chiefly. Lap surface error, which is the mismatch between the mirror and the lap, causes partial pressure concentration and poor efficiency in grinding or polishing. Different from surface representation of active stressed lap using PV and RMS, structure function could describe average variance over all regions on lap in a given separation. This paper illustrates an efficient technique for representing active stressed lap surface error using structure function and relating bending model to the representation. Example of this procedure is described and results show that this method could represent lap surface exactly; meanwhile the surface accuracy after compensating residual error caused by lap sag could achieve allowable error specification for big mirror manufacturing. |
| 学科主题 | Structure function; Active stressed lap; Big mirror processing; Surface representation |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000353630200008 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7043]  |
| 专题 | 光电技术研究所_先光中心 |
| 作者单位 | 1.[Zhao, Hongshen 2.Fan, Bin 3.Li, Xiaojin 4.Zeng, Zhige] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China 5.[Zhao, Hongshen] Univ Chinese Acad Sci, Beijing 100039, Peoples R China |
| 推荐引用方式 GB/T 7714 | Zhao, Hongshen,Fan, Bin,Li, Xiaojin,et al. Surface accuracy analysis of active stressed lap based on structure function[J]. OPTICAL REVIEW,2015,22(1):52-57. |
| APA | Zhao, Hongshen,Fan, Bin,Li, Xiaojin,&Zeng, Zhige.(2015).Surface accuracy analysis of active stressed lap based on structure function.OPTICAL REVIEW,22(1),52-57. |
| MLA | Zhao, Hongshen,et al."Surface accuracy analysis of active stressed lap based on structure function".OPTICAL REVIEW 22.1(2015):52-57. |
入库方式： OAI收割
来源：光电技术研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。