Wavefront testing of pinhole based on point diffraction interferometer
文献类型：会议论文
| 作者 | Jia, Xin; Xing, Tingwen; Xu, Jiajun; Lin, Wumei; Liao, Zhijie |
| 出版日期 | 2013 |
| 会议名称 | Proceedings of SPIE: Optical Microlithography XXVI |
| 会议日期 | 2013 |
| 卷号 | 8683 |
| 页码 | 86832F |
| 中文摘要 | To overcome the accuracy limitation due to the aberration of reference wavefront in the interferometer testing, the point diffraction interferometer (PDI) uses the pinhole to create an ideal diffraction sphere wavefront as the reference wavefront. Because the perfect pinhole is hard to manufacture, then the imperfect pinhole will cause the wavefront errors which will influence the test accuracy. In this paper we use the absolute testing method to test the wave front of the pinhole. Then the testing accuracy of point diffraction interferometer can be improved by subtracting the error of the pinhole. In this paper a Phase-shifting point diffraction interferometer system is designed to testing the pinhole. We use three pinholes to test each other. According the algorithm of the absolute testing method, we can calculate the wavefront error of the pinhole. Then the testing accuracy of point diffraction interferometer can be improved by subtracting the error of the pinhole. © 2013 SPIE. |
| 英文摘要 | To overcome the accuracy limitation due to the aberration of reference wavefront in the interferometer testing, the point diffraction interferometer (PDI) uses the pinhole to create an ideal diffraction sphere wavefront as the reference wavefront. Because the perfect pinhole is hard to manufacture, then the imperfect pinhole will cause the wavefront errors which will influence the test accuracy. In this paper we use the absolute testing method to test the wave front of the pinhole. Then the testing accuracy of point diffraction interferometer can be improved by subtracting the error of the pinhole. In this paper a Phase-shifting point diffraction interferometer system is designed to testing the pinhole. We use three pinholes to test each other. According the algorithm of the absolute testing method, we can calculate the wavefront error of the pinhole. Then the testing accuracy of point diffraction interferometer can be improved by subtracting the error of the pinhole. © 2013 SPIE. |
| 收录类别 | EI |
| 学科主题 | Diffraction - Interferometers - Measurements - Optical testing |
| 语种 | 英语 |
| ISSN号 | 0277786X |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7475]  |
| 专题 | 光电技术研究所_应用光学研究室（二室） |
| 作者单位 | Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China |
| 推荐引用方式 GB/T 7714 | Jia, Xin,Xing, Tingwen,Xu, Jiajun,et al. Wavefront testing of pinhole based on point diffraction interferometer[C]. 见:Proceedings of SPIE: Optical Microlithography XXVI. 2013. |
入库方式： OAI收割
来源：光电技术研究所
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