Absolute testing of flats with all terms by using even and odd functions
文献类型:会议论文
作者 | Jia, Xin; Xu, Fuchao; Xing, Tingwen; Liu, Zhixiang |
出版日期 | 2013 |
会议名称 | Proceedings of SPIE: Modeling Aspects in Optical Metrology IV, 2013 |
会议日期 | 2013 |
卷号 | 8789 |
页码 | 878911 |
中文摘要 | In Cartesian coordinate system, a flat can be expressed as the sum of even-odd, odd-even, even-even and oddodd functions. In the traditional three-flat even and odd function method, odd-odd function is difficult to obtain. In our paper the odd-odd function can be solved by use the Dove prism which can rotate the optical axis. The odd-odd function can calculate exactly. The even-odd, odd-even, even-even can be solved by rotating the flat 180 like the traditional method. Only five configurations are used to test the flats. The theoretical derivation and analysis are presented. © 2013 SPIE. |
英文摘要 | In Cartesian coordinate system, a flat can be expressed as the sum of even-odd, odd-even, even-even and oddodd functions. In the traditional three-flat even and odd function method, odd-odd function is difficult to obtain. In our paper the odd-odd function can be solved by use the Dove prism which can rotate the optical axis. The odd-odd function can calculate exactly. The even-odd, odd-even, even-even can be solved by rotating the flat 180 like the traditional method. Only five configurations are used to test the flats. The theoretical derivation and analysis are presented. © 2013 SPIE. |
收录类别 | EI |
学科主题 | Measurements - Molecular physics - Optical testing |
语种 | 英语 |
ISSN号 | 0277786X |
源URL | [http://ir.ioe.ac.cn/handle/181551/7478] ![]() |
专题 | 光电技术研究所_应用光学研究室(二室) |
作者单位 | Lab of Applied Optics, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China |
推荐引用方式 GB/T 7714 | Jia, Xin,Xu, Fuchao,Xing, Tingwen,et al. Absolute testing of flats with all terms by using even and odd functions[C]. 见:Proceedings of SPIE: Modeling Aspects in Optical Metrology IV, 2013. 2013. |
入库方式: OAI收割
来源:光电技术研究所
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