Extended range phase-sensitive swept source interferometer for real-time dimensional metrology
文献类型：期刊论文
| 作者 | Shen, Yi1; Ding, Zhihua1; Yan, Yangzhi1; Wang, Chuan1; Yang, Yaliang2; Zhang, Yudong2 |
| 刊名 | Optics Communications
 |
| 出版日期 | 2014 |
| 卷号 | 318页码:88-94 |
| ISSN号 | 00304018 |
| 通讯作者 | Ding, Z. (zh_ding@zju.edu.cn) |
| 中文摘要 | The measurement of center thicknesses and airgaps along its optical axis is crucial to a mounted optical system. Aiming to real-time dimensional metrology, an extended range phase-sensitive swept source interferometric system is developed. To yield high precision of measurement, reference interferometer sharing the same swept source with the measurement interferometer is introduced and a phase-sensitive approach based on phase-comparison between measurement signal and reference signal is exploited. The proposed phase-comparison method is theoretically developed and its merits over standard phase-sensitive approach are experimentally confirmed. In contrast to the standard phase-sensitive approach, the sensitivity under signal to noise ratio of 45 dB achieved by the phase-comparison method is improved from 222 nm to 25 nm and the processing time is shorten by 90%. Measurements of glass plates are performed to evaluate the performance of the developed system. Submicron precision about a range of 30 mm is realized by the developed system equipped by a commercial available swept source operating at a sweeping rate of 10 kHz. The developed system holds potential application in real-time contact-free on-axis metrology for the fabrication and testing of complex optical systems. © 2013 Elsevier B.V. |
| 英文摘要 | The measurement of center thicknesses and airgaps along its optical axis is crucial to a mounted optical system. Aiming to real-time dimensional metrology, an extended range phase-sensitive swept source interferometric system is developed. To yield high precision of measurement, reference interferometer sharing the same swept source with the measurement interferometer is introduced and a phase-sensitive approach based on phase-comparison between measurement signal and reference signal is exploited. The proposed phase-comparison method is theoretically developed and its merits over standard phase-sensitive approach are experimentally confirmed. In contrast to the standard phase-sensitive approach, the sensitivity under signal to noise ratio of 45 dB achieved by the phase-comparison method is improved from 222 nm to 25 nm and the processing time is shorten by 90%. Measurements of glass plates are performed to evaluate the performance of the developed system. Submicron precision about a range of 30 mm is realized by the developed system equipped by a commercial available swept source operating at a sweeping rate of 10 kHz. The developed system holds potential application in real-time contact-free on-axis metrology for the fabrication and testing of complex optical systems. © 2013 Elsevier B.V. |
| 学科主题 | Interferometers - Optical systems - Units of measurement |
| 收录类别 | SCI ; EI |
| 语种 | 英语 |
| WOS记录号 | WOS:000332817200017 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/6390]  |
| 专题 | 光电技术研究所_自适应光学技术研究室（八室） |
| 作者单位 | 1.State Key Lab of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China 2.Key Laboratory on Adaptive Optics, Chinese Academy of Sciences, Chengdu 610209, China |
| 推荐引用方式 GB/T 7714 | Shen, Yi,Ding, Zhihua,Yan, Yangzhi,et al. Extended range phase-sensitive swept source interferometer for real-time dimensional metrology[J]. Optics Communications,2014,318:88-94. |
| APA | Shen, Yi,Ding, Zhihua,Yan, Yangzhi,Wang, Chuan,Yang, Yaliang,&Zhang, Yudong.(2014).Extended range phase-sensitive swept source interferometer for real-time dimensional metrology.Optics Communications,318,88-94. |
| MLA | Shen, Yi,et al."Extended range phase-sensitive swept source interferometer for real-time dimensional metrology".Optics Communications 318(2014):88-94. |
入库方式： OAI收割
来源：光电技术研究所
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