Microstructure Changes of Ti-Al-C Films Deposited by Filtered Cathodic Vacuum Arc
文献类型：期刊论文
| 作者 | Pang XJ(逄显娟)1,2,3; Liu XQ(刘小强)2 ; Jin, Bo2
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| 刊名 | Journal of Nanomaterials
 |
| 出版日期 | 2014 |
| 页码 | 286484(1-7) |
| ISSN号 | 1687-4110 |
| 英文摘要 | Nanocomposite Ti-Al-C films were deposited by filtered cathodic vacuum arc (FCVA) at different CH4 flows. The deposited films were characterized in terms of elemental and phase compositions, chemical bonds, and texture as a function of CH4 flow rate by XRD, XPS, HRTEM, Raman spectroscopy, and IR spectroscopy. The results show that the TiC grain size decreases from 4.2 to 2.9 nm as the CH4 flow rate increases from 30 to 80 sccm. The analysis of XPS, HRTEM, and Raman spectroscopy shows that the microstructure of deposited films turns from a TiC dominant TiC-C film to a carbon network dominant TiAl-doped a-C film structure as the CH4 flow increases from 30 sccm to 80 sccm. IR spectroscopy shows that most of the hydrogen atoms in the deposited films are bonded to the sp3-hybridized C atoms. All the composition and microstructure change can be explained by considering the plasma conditions and the effect of CH4 flow. |
| 学科主题 | 材料科学与物理化学 |
| 收录类别 | SCI |
| 资助信息 | the Natural Science Foundation of China (Grant no. 50902133);the Project of the Education Department of Henan Province (14A430009);the Open Fund of State Key Laboratory of Solid Lubrication (1201);the Fund of Henan University of Science and Technology (2013QN001) |
| 语种 | 英语 |
| WOS记录号 | WOS:000335247300001 |
| 源URL | [http://210.77.64.217/handle/362003/20334]  |
| 专题 | 兰州化学物理研究所_固体润滑国家重点实验室 |
| 作者单位 | 1.Henan Univ Sci & Technol, Sch Chem Engn & Pharmaceut, Luoyang 471023, Peoples R China 2.Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China 3.Henan Key Lab Mat Tribol, Luoyang 471003, Peoples R China |
| 推荐引用方式 GB/T 7714 | Pang XJ,Liu XQ,Jin, Bo. Microstructure Changes of Ti-Al-C Films Deposited by Filtered Cathodic Vacuum Arc[J]. Journal of Nanomaterials,2014:286484(1-7). |
| APA | Pang XJ,Liu XQ,&Jin, Bo.(2014).Microstructure Changes of Ti-Al-C Films Deposited by Filtered Cathodic Vacuum Arc.Journal of Nanomaterials,286484(1-7). |
| MLA | Pang XJ,et al."Microstructure Changes of Ti-Al-C Films Deposited by Filtered Cathodic Vacuum Arc".Journal of Nanomaterials (2014):286484(1-7). |
入库方式： OAI收割
来源：兰州化学物理研究所
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