Soft lithography of ceramic microparts using wettability-tunable poly (dimethylsiloxane) (PDMS) molds
文献类型：期刊论文
| 作者 | Su B(苏博)1,2 ; Zhang AJ(张爱军)1,2; Meng JH(孟军虎)1; Zhang ZZ(张招柱)1
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| 刊名 | Journal of Micromechanics and Microengineering
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| 出版日期 | 2016 |
| 卷号 | 26期号:7页码:075001(1-6) |
| ISSN号 | 0960-1317 |
| 关键词 | ceramics microparts micropatterns soft lithography PDMS plasma treatment |
| 通讯作者 | 孟军虎 ; 张招柱 |
| 英文摘要 | Green alumina microparts were fabricated from a high solid content aqueous suspension by microtransfer molding using air plasma-treated poly(dimethylsiloxane) (PDMS) molds. The wettability of the air plasma-treated PDMS molds spontaneously changed between the hydrophilic and hydrophobic states during the process. Initial hydrophilicity of the air plasma-treated PDMS molds significantly improved the flowability of the concentrated suspension. Subsequent hydrophobic recovery of the air plasma-treated PDMS molds enabled a perfect demolding of the green microparts. Consequently, defect-free microchannel parts of 60 μm and a micromixer with an area of several square centimeters were successfully fabricated. In soft lithography, tuning the wetting behavior of PDMS molds has a great effect on the quality of ceramic microparts. Using wettability-tunable PDMS molds has great potential in producing complex-shaped and large-area ceramic microparts and micropatterns. |
| 学科主题 | 材料科学与物理化学 |
| 资助信息 | the National Natural Science Foundation of China (grant no. 51375473);the Hundred Talent Program (Junhu Meng) of the Chinese Academy of Sciences |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000402409900001 |
| 源URL | [http://210.77.64.217/handle/362003/20435]  |
| 专题 | 兰州化学物理研究所_先进润滑与防护材料研究发展中心 兰州化学物理研究所_固体润滑国家重点实验室 |
| 作者单位 | 1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences 2.University of Chinese Academy of Sciences |
| 推荐引用方式 GB/T 7714 | Su B,Zhang AJ,Meng JH,et al. Soft lithography of ceramic microparts using wettability-tunable poly (dimethylsiloxane) (PDMS) molds[J]. Journal of Micromechanics and Microengineering,2016,26(7):075001(1-6). |
| APA | Su B,Zhang AJ,Meng JH,&Zhang ZZ.(2016).Soft lithography of ceramic microparts using wettability-tunable poly (dimethylsiloxane) (PDMS) molds.Journal of Micromechanics and Microengineering,26(7),075001(1-6). |
| MLA | Su B,et al."Soft lithography of ceramic microparts using wettability-tunable poly (dimethylsiloxane) (PDMS) molds".Journal of Micromechanics and Microengineering 26.7(2016):075001(1-6). |
入库方式： OAI收割
来源：兰州化学物理研究所
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