In this work, two kinds of high temperature shape memory copolyimides were prepared and the shape memory cycles induced structural evolution of macromolecular chains was investigated in detail. The glass transition temperature (T_g) of poly(benzoxazole-co-imide) (PI1) and poly(benzimidazole-co-imide) (PI2) are 280 °C and 355 °C, respectively. The results show that PI1 could keep stable macromolecular chain structure under shape memory cycles and exhibit outstanding shape memory performance (R_f > 98%, R_r > 97%) under different stretch condition. Whereas, shape memory cycles induced orientation with more ordered macromolecular chains packing is formed for PI2 after several thermal mechanical cycles, which strongly affect physical crosslinking points, thermal mechanical properties as well as shape memory behaviors. The study on macroscopic property and microscopic structure evolution will promote a better understanding of the shape memory effect of polyimides and accelerate development of high performance polyimides for shape memory applications.