The microstructure and improved mechanical properties of Ag/Cu nanoscaled multilayer films deposited by magnetron sputtering
文献类型:期刊论文
作者 | Hu M(胡明)![]() ![]() ![]() ![]() ![]() ![]() ![]() |
刊名 | Applied Surface Science
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出版日期 | 2014 |
卷号 | 313页码:563-568 |
关键词 | Multilayer film Solid lubricant Hardness Tribological properties |
ISSN号 | 0169-4332 |
通讯作者 | 胡明 ; 刘维民 |
英文摘要 | The Ag/Cu nanoscaled multilayer films, which had a constant thickness of Ag layer (about 15 nm) and various thicknesses of Cu layer from about 4 to 20 nm, have been deposited by magnetron sputtering technique. The phase composition, microstructure, surface topography and mechanical properties of these films were investigated, respectively. XRD results revealed that both Ag and Cu layers in multilayer films had a polycrystalline fcc structure with preferred growth of (1 1 1) orientation. The crystallite sizes decreased greatly compared with that of pure Ag film. High-resolution TEM analysis indicated that the multilayers exhibited obvious interfaces between Ag and Cu layers and had dense and columnar grain morphology. AFM analysis showed that all the multilayers with various thicknesses of Cu layers were much smoother than their constituent Ag and Cu pure films. As compared to that of pure Ag (1.7 GPa) and Cu (2.1 GPa) films, as well as, the hardness values calculated from the rule-of-mixtures, a remarkable increase of hardness was observed for all the multilayer films. The maximum hardness value of 4.3 GPa was obtained for the multilayer film with about 20 nm Cu layer. The vacuum ball-on-disk tribotest results suggested that the multilayer film with highest hardness showed a slight decrease in friction coefficient and notable increase in wear resistance. Especially, these results about mechanical and tribological properties were discussed as a function of the film microstructure. |
学科主题 | 材料科学与物理化学 |
收录类别 | SCI |
资助信息 | the National Natural Science Foundation of China (Grant No. 51305427) |
语种 | 英语 |
WOS记录号 | WOS:000340689000074 |
源URL | [http://210.77.64.217/handle/362003/20711] ![]() |
专题 | 兰州化学物理研究所_先进润滑与防护材料研究发展中心 兰州化学物理研究所_固体润滑国家重点实验室 |
通讯作者 | Hu M(胡明); Liu WM(刘维民) |
作者单位 | Chinese Acad Sci, Lanzhou Inst Chem Phys, State Key Lab Solid Lubricat, Lanzhou 730000, Peoples R China |
推荐引用方式 GB/T 7714 | Hu M,Gao XM,Weng LJ,et al. The microstructure and improved mechanical properties of Ag/Cu nanoscaled multilayer films deposited by magnetron sputtering[J]. Applied Surface Science,2014,313:563-568. |
APA | Hu M.,Gao XM.,Weng LJ.,Sun JY.,Liu WM.,...&刘维民.(2014).The microstructure and improved mechanical properties of Ag/Cu nanoscaled multilayer films deposited by magnetron sputtering.Applied Surface Science,313,563-568. |
MLA | Hu M,et al."The microstructure and improved mechanical properties of Ag/Cu nanoscaled multilayer films deposited by magnetron sputtering".Applied Surface Science 313(2014):563-568. |
入库方式: OAI收割
来源:兰州化学物理研究所
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