Growth of large-scale heteroepitaxial 3C-SiC films and nanosheets on silicon substrates by microwave plasma enhanced CVD at higher powers
文献类型：期刊论文
| 作者 | Wang, Chun ; Huang, Nan ; Zhuang, Hao ; Zhai, Zhaofeng ; Yang, Bing ; Liu, Lusheng ; Jiang, Xin |
| 刊名 | SURFACE & COATINGS TECHNOLOGY
 |
| 出版日期 | 2016-08-15 |
| 卷号 | 299页码:96-103 |
| 关键词 | SiC films MPCVD Heteroepitaxial Large-scale 2D nanosheets |
| ISSN号 | 0257-8972 |
| 通讯作者 | Jiang, X (reprint author), Chinese Acad Sci, Inst Met Res, Shenyang Natl Lab Mat Sci, Wenhua Rd 72, Shenyang 110016, Peoples R China. |
| 学科主题 | Materials Science ; Physics |
| 收录类别 | SCI |
| 资助信息 | National Natural Science Foundation of China [51202257] |
| 语种 | 英语 |
| 公开日期 | 2016-08-22 |
| 源URL | [http://ir.imr.ac.cn/handle/321006/75771]  |
| 专题 | 金属研究所_中国科学院金属研究所 |
| 推荐引用方式 GB/T 7714 | Wang, Chun,Huang, Nan,Zhuang, Hao,et al. Growth of large-scale heteroepitaxial 3C-SiC films and nanosheets on silicon substrates by microwave plasma enhanced CVD at higher powers[J]. SURFACE & COATINGS TECHNOLOGY,2016,299:96-103. |
| APA | Wang, Chun.,Huang, Nan.,Zhuang, Hao.,Zhai, Zhaofeng.,Yang, Bing.,...&Jiang, Xin.(2016).Growth of large-scale heteroepitaxial 3C-SiC films and nanosheets on silicon substrates by microwave plasma enhanced CVD at higher powers.SURFACE & COATINGS TECHNOLOGY,299,96-103. |
| MLA | Wang, Chun,et al."Growth of large-scale heteroepitaxial 3C-SiC films and nanosheets on silicon substrates by microwave plasma enhanced CVD at higher powers".SURFACE & COATINGS TECHNOLOGY 299(2016):96-103. |
入库方式： OAI收割
来源：金属研究所
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