Practical method study on correcting yaw error of 500 mm grating blank carriage in real time
文献类型：期刊论文
| 作者 | Yang, C.; X. T. Li; H. L. Yu; H. Z. Yu; J. W. Zhu; S. W. Zhang; J. X. Gao; Bayanheshig and Y. G. Tang |
| 刊名 | Applied Optics
 |
| 出版日期 | 2015 |
| 卷号 | 54期号:13页码:4084-4088 |
| 英文摘要 | We provided a method to correct the yaw error of a 500 mm grating blank carriage in real time, as the yaw error will bring down the quality of wavefront. We designed a structure with double piezoelectric devices to correct the yaw error. At the same time, to evaluate the correcting ability of our structure, we proposed a relative optical testing structure to verify the correcting accuracy by experiments. The experiment result showed that our method can accomplish the correction of yaw error in real time effectively, at the same time guaranteeing the grating quality. (C) 2015 Optical Society of America. |
| 收录类别 | SCI ; EI |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/55378]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出 |
| 推荐引用方式 GB/T 7714 | Yang, C.,X. T. Li,H. L. Yu,et al. Practical method study on correcting yaw error of 500 mm grating blank carriage in real time[J]. Applied Optics,2015,54(13):4084-4088. |
| APA | Yang, C..,X. T. Li.,H. L. Yu.,H. Z. Yu.,J. W. Zhu.,...&Bayanheshig and Y. G. Tang.(2015).Practical method study on correcting yaw error of 500 mm grating blank carriage in real time.Applied Optics,54(13),4084-4088. |
| MLA | Yang, C.,et al."Practical method study on correcting yaw error of 500 mm grating blank carriage in real time".Applied Optics 54.13(2015):4084-4088. |
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