Establishment of theoretical model and experimental equipment for researching on carbon contamination of EUV multi-layer mirror
文献类型：会议论文
| 作者 | Gong, Xuepeng ; Lu, Qipeng; Lu, Guoqing
|
| 出版日期 | 2015 |
| 会议名称 | 9th International Symposium on Precision Engineering Measurements and Instrumentation |
| 会议日期 | August 8 |
| 会议地点 | Changsha |
| 源URL | [http://ir.ciomp.ac.cn/handle/181722/55562]  |
| 专题 | 长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文 |
| 推荐引用方式 GB/T 7714 | Gong, Xuepeng,Lu, Qipeng,Lu, Guoqing. Establishment of theoretical model and experimental equipment for researching on carbon contamination of EUV multi-layer mirror[C]. 见:9th International Symposium on Precision Engineering Measurements and Instrumentation. Changsha. August 8. |
入库方式： OAI收割
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