石英玻璃金属化的蒙特卡洛模拟
文献类型：期刊论文
| 作者 | 崔新强; 陈佳; 李海兵 |
| 刊名 | 表面技术
 |
| 出版日期 | 2014 |
| 卷号 | 43期号:5页码:105 |
| 关键词 | 蒙特卡洛 金属化 离子注入 |
| 其他题名 | Monte-Carlo Simulation of Quartz Glass Metallization |
| 通讯作者 | 崔新强, 中国科学院上海光学精密机械研究所, 上海 201800, 中国. ; 陈佳, 中国科学院上海光学精密机械研究所, 上海 201800, 中国. ; 李海兵, 中国科学院上海光学精密机械研究所, 上海 201800, 中国. |
| 中文摘要 | 目的通过SRIM程序模拟,对石英玻璃金属化工艺进行优化。方法对不同情况界面进行对比分析,配合SRIM程序模拟,得出理想的金属化界面,提出通过增加阻挡层的方法来得到这种界面。分析SRIM程序模拟结果,选取阻挡层分别为5,10,15,20 nm四种厚度,模拟能量20 keV的Ti离子注入不同厚度阻挡层样品中的射程分布,获取合适的阻挡层厚度,并利用高低温冲击方法进行验证。结果合适的阻挡层厚度范围为10~15 nm,在此范围内,注入的Ti离子最大浓度位置集中在金属化层与石英玻璃之间的界面附近。结论利用SRIM程序模拟可以得出最佳的阻挡层厚度范围,提高金属化层的性能。 |
| 英文摘要 | Objective To optimize the process of quartz metallization through SRIM simulation.Methods Though comparative analysis of different interfaces combined with SRIM simulation, the ideal metallization interface was obtained. The approach of adding the blocking layer was put forward to get the interface. The SRIM simulation results were analyzed, and four kinds of thickness (5, 10, 15, 20 nm) were selected. The range distribution of Ti ion with the energy of 20 keV implanted into specimens of blocking layer with different thicknesses was simulated to select the appropriate thickness and the metallization layer was tested with the method of high and low temperature shock.Results The range for the appropriate thickness of the blocking layer was 10~15 nm. Within this range, the site for the maximum concentration of implanted Ti was near the interface between the metallization layer and the quartz glass.Conclusion For the different ion implantation energy, the simulation could obtain the optimum thickness of blocking layer using SRIM program, and then improve the performance of the metallization layer. |
| 收录类别 | CSCD |
| 语种 | 中文 |
| CSCD记录号 | CSCD:5255925 |
| 版本 | 出版稿 |
| 源URL | [http://ir.siom.ac.cn/handle/181231/12560]  |
| 专题 | 上海光学精密机械研究所_高功率激光单元技术研发中心 |
| 作者单位 | 1.Cui Xinqiang, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. 2.Chen Jia, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. 3.Li Haibing, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. |
| 推荐引用方式 GB/T 7714 | 崔新强,陈佳,李海兵. 石英玻璃金属化的蒙特卡洛模拟[J]. 表面技术,2014,43(5):105. |
| APA | 崔新强,陈佳,&李海兵.(2014).石英玻璃金属化的蒙特卡洛模拟.表面技术,43(5),105. |
| MLA | 崔新强,et al."石英玻璃金属化的蒙特卡洛模拟".表面技术 43.5(2014):105. |
入库方式： OAI收割
来源：上海光学精密机械研究所
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