中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
HF酸处理对石英玻璃355 nm激光损伤影响研究

文献类型:期刊论文

作者迟海军; 高勋; 赵东峰; 林景全
刊名激光与红外
出版日期2014
卷号44期号:9页码:987
关键词激光损伤阈值 石英玻璃 HF酸处理
其他题名Study on influence of HF acid treatment on 355 nm laser damage of quartz glass
通讯作者迟海军, 长春理工大学理学院, 长春, 吉林 130022, 中国. ; 高勋, 长春理工大学理学院, 长春, 吉林 130022, 中国. ; 林景全, 长春理工大学理学院, 长春, 吉林 130022, 中国. ; 赵东峰, 上海光学精密机械研究所高功率激光物理联合实验室, 上海 201800, 中国.
中文摘要利用HF酸处理提高石英玻璃355nm激光诱导损伤阈值,通过优化HF溶液浓度以及石英玻璃表面的酸处理时间,石英玻璃的透过率和损伤阈值均有所提高,均随HF酸浓度以及酸处理时间的增加呈现先增加后下降变化。实验结果表明质量管理中心_期刊论文分数10%的HF浓度刻蚀60 min后石英玻璃的激光损伤阈值为15.17 J/cm~2,相比酸处理前提高了167.5%。对比分析了相同激光能量密度作用下有无HF酸处理石英玻璃表面损伤面积变化,最后给出了 HF酸处理提高石英玻璃的激光诱导损伤阈值机制。
英文摘要In this paper,355nm laser induced damage threshold of the quartz glass was improved by HF acid treatment,optical transmissivity and damage threshold of quartz glass were improved by optimizing the HF concentration and acid etched time,which show that optical transmissivity and damage threshold were increased then decreased with the increase of the HF concentration and acid etched time. The experimental results show that the laser induced damage threshold of quartz glass at the experiment conditions of the 10% HF concentration and etched time 60 minutes is 15. 17 J/cm~2 and improves 167. 5% compared to damage threshold before the acid treatment. The surface damage area change of quartz glass induced by the same 355 nm laser energy density with/without HF acid etching was comparatively analyzed. Finally, the improvement mechanisms of 355 nm laser induced damage threshold of quartz glass after the HF acid treatment are given.
收录类别CSCD
语种中文
CSCD记录号CSCD:5240801
版本出版稿
源URL[http://ir.siom.ac.cn/handle/181231/12553]  
专题上海光学精密机械研究所_高功率激光物理国家实验室
作者单位1.Chi Haijun, School of Science,Changchun University of Science and Technology, Changchun, Jilin 130022, China.
2.Gao Xun, School of Science,Changchun University of Science and Technology, Changchun, Jilin 130022, China.
3.Lin Jingquan, School of Science,Changchun University of Science and Technology, Changchun, Jilin 130022, China.
4.Zhao Dongfeng, Joint Laboratory for High Power Laser Physics, Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences, Shanghai 201800, China.
推荐引用方式
GB/T 7714
迟海军,高勋,赵东峰,等. HF酸处理对石英玻璃355 nm激光损伤影响研究[J]. 激光与红外,2014,44(9):987.
APA 迟海军,高勋,赵东峰,&林景全.(2014).HF酸处理对石英玻璃355 nm激光损伤影响研究.激光与红外,44(9),987.
MLA 迟海军,et al."HF酸处理对石英玻璃355 nm激光损伤影响研究".激光与红外 44.9(2014):987.

入库方式: OAI收割

来源:上海光学精密机械研究所

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