Research on digital gray-tone projection lithography
文献类型：会议论文
| 作者 | Wang Jian; Zhao Lixin; Yan WEi; Xu Wenxiang; Hu Song; Tang Xiaoping; Wang Zhaozhi; Wang Shurong; Zhang Zhengrong |
| 出版日期 | 2009 |
| 会议名称 | Proceedings of SPIE |
| 会议日期 | 2009 |
| 卷号 | 7284 |
| 通讯作者 | Wang Jian |
| 中文摘要 | With the development of MEMS and MOEMS technology, digital gray-toned maskless lithography will meet the demand on devices manufacturing with its advantage of low cost, flexible and high efficiency. A kind of novel projection lithography based on Digital Micromirror Device (DMD) was introduced in this paper. and the gray-tone and imaging principle were analysed too. A projection optical system was designed based on DMD technology in this paper. Experiments show that digital gray-tone projection lithography technology has advantage of high flexibility and convenience, especially for the manufacturing of small production of specific structures. |
| 英文摘要 | With the development of MEMS and MOEMS technology, digital gray-toned maskless lithography will meet the demand on devices manufacturing with its advantage of low cost, flexible and high efficiency. A kind of novel projection lithography based on Digital Micromirror Device (DMD) was introduced in this paper. and the gray-tone and imaging principle were analysed too. A projection optical system was designed based on DMD technology in this paper. Experiments show that digital gray-tone projection lithography technology has advantage of high flexibility and convenience, especially for the manufacturing of small production of specific structures. |
| 收录类别 | EI |
| 语种 | 英语 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7634]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室） |
| 作者单位 | 中国科学院光电技术研究所 |
| 推荐引用方式 GB/T 7714 | Wang Jian,Zhao Lixin,Yan WEi,et al. Research on digital gray-tone projection lithography[C]. 见:Proceedings of SPIE. 2009. |
入库方式： OAI收割
来源：光电技术研究所
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