The theoretical analysis of tri-beam SPPs interference through Ag film
文献类型：会议论文
| 作者 | Fengze Jin; JinglEi Du; Yongkang Guo; Lifang Shi; ChunlEi Du |
| 出版日期 | 2009 |
| 会议名称 | Proceedings of SPIE |
| 会议日期 | 2009 |
| 卷号 | 7284 |
| 页码 | 1-5 |
| 通讯作者 | Fengze Jin |
| 中文摘要 | Through combination of multi-beam coherent SPPs which are excited by p-polarized wide light which illuminates the interface between prism and metal with resonance angle for interference exposure with, and optimizes exposal parameter of interference lithography, we can obtain high differentiate and high contrast of periodicity nanometer structure by using SPPs of shortwave and near field with enhanced. In this paper,we set up interferential model of SPPs using equation groups of Maxwell below Kretschmann structure, and simulate SPPs interferns and receive nanometer lattice and discuss the influence of refractive index of prism and resist .The method is suitable for fabricating nanometer photonic crystal and deep sub-micrometer periodic patterns in large field size used in opto-eletronical components and it can effectively debase got-up cost. |
| 英文摘要 | Through combination of multi-beam coherent SPPs which are excited by p-polarized wide light which illuminates the interface between prism and metal with resonance angle for interference exposure with, and optimizes exposal parameter of interference lithography, we can obtain high differentiate and high contrast of periodicity nanometer structure by using SPPs of shortwave and near field with enhanced. In this paper,we set up interferential model of SPPs using equation groups of Maxwell below Kretschmann structure, and simulate SPPs interferns and receive nanometer lattice and discuss the influence of refractive index of prism and resist .The method is suitable for fabricating nanometer photonic crystal and deep sub-micrometer periodic patterns in large field size used in opto-eletronical components and it can effectively debase got-up cost. |
| 收录类别 | EI |
| 语种 | 英语 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7677]  |
| 专题 | 光电技术研究所_微电子装备总体研究室（四室微光学） |
| 作者单位 | 中国科学院光电技术研究所 |
| 推荐引用方式 GB/T 7714 | Fengze Jin,JinglEi Du,Yongkang Guo,et al. The theoretical analysis of tri-beam SPPs interference through Ag film[C]. 见:Proceedings of SPIE. 2009. |
入库方式： OAI收割
来源：光电技术研究所
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