Design and optimization of 2D electrostatic micro scanning mirrors
文献类型：会议论文
| 作者 | Ma Wenying; Hu Fangrong; Cai DongmEi; Wang Dajia; Yao Jun; Qiu Chuankai |
| 出版日期 | 2009 |
| 会议名称 | Proceedings of SPIE |
| 会议日期 | 2009 |
| 卷号 | 7284 |
| 通讯作者 | Ma Wenying |
| 中文摘要 | This paper demonstrates a 2D (two-dimensional) electrostatic MEMS scanning mirror. This scanner rotates on both axis X and Y, giving a two degrees of freedom. Finite element analysis has shown that optical scanning angle on axis X is 5.0° at 120V and axis Y is 4.4°at 160V. The structure has been optimized to achieve good dynamic performance. |
| 英文摘要 | This paper demonstrates a 2D (two-dimensional) electrostatic MEMS scanning mirror. This scanner rotates on both axis X and Y, giving a two degrees of freedom. Finite element analysis has shown that optical scanning angle on axis X is 5.0° at 120V and axis Y is 4.4°at 160V. The structure has been optimized to achieve good dynamic performance. |
| 收录类别 | EI |
| 语种 | 英语 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7869]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 中国科学院光电技术研究所 |
| 推荐引用方式 GB/T 7714 | Ma Wenying,Hu Fangrong,Cai DongmEi,et al. Design and optimization of 2D electrostatic micro scanning mirrors[C]. 见:Proceedings of SPIE. 2009. |
入库方式： OAI收割
来源：光电技术研究所
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