Design and analysis of repulsive electrostatic driven MEMS actuators
文献类型：会议论文
| 作者 | Yao Jun; Hu Fangrong; Cai DongmEi; Jiang Wenhan |
| 出版日期 | 2009 |
| 会议名称 | Proceedings of SPIE |
| 会议日期 | 2009 |
| 卷号 | 7209 |
| 通讯作者 | Yao Jun |
| 中文摘要 | For many astronomical systems, Adaptive Optics (AO) plays an important role. Here, we report some preliminary studies on MEMS (Micro-Electro-Mechanical-System) Project for micro actuators in AO applications at the Institute of Optics and Electronics, Chinese Academy of Science. This paper presents a few MEMS actuators based on repulsive electrostatic driven mechanism, which can achieve large out-of-plane strokes through eliminating the electrostatic pull-in effect. Design principles, including the layout and the physical dimension of electrodes, and FEA models are illustrated; it provides helpful guidance for designing electrostatic repulsive actuators for bEing implemented in Deformable Mirrors (DMs). Some repulsive electrostatic driven micro actuators are given, the analysis focus on the displacement versus applied voltage and resonant frequency. Repulsive electrostatic driven actuators can achieve large strokes and high resonant frequencies, they meet the important requirements for DMs. |
| 英文摘要 | For many astronomical systems, Adaptive Optics (AO) plays an important role. Here, we report some preliminary studies on MEMS (Micro-Electro-Mechanical-System) Project for micro actuators in AO applications at the Institute of Optics and Electronics, Chinese Academy of Science. This paper presents a few MEMS actuators based on repulsive electrostatic driven mechanism, which can achieve large out-of-plane strokes through eliminating the electrostatic pull-in effect. Design principles, including the layout and the physical dimension of electrodes, and FEA models are illustrated; it provides helpful guidance for designing electrostatic repulsive actuators for bEing implemented in Deformable Mirrors (DMs). Some repulsive electrostatic driven micro actuators are given, the analysis focus on the displacement versus applied voltage and resonant frequency. Repulsive electrostatic driven actuators can achieve large strokes and high resonant frequencies, they meet the important requirements for DMs. |
| 收录类别 | EI |
| 语种 | 英语 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7871]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 中国科学院光电技术研究所 |
| 推荐引用方式 GB/T 7714 | Yao Jun,Hu Fangrong,Cai DongmEi,et al. Design and analysis of repulsive electrostatic driven MEMS actuators[C]. 见:Proceedings of SPIE. 2009. |
入库方式： OAI收割
来源：光电技术研究所
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