A 19 element hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror
文献类型：会议论文
| 作者 | Wang, Weimin1,2,3; Tao, Fenggang1,3; Zhang, Jianfei1,3; Yao, Jun1 |
| 出版日期 | 2012 |
| 会议名称 | Key Engineering Materials, 13th Annual Conference of Chinese Society of Micro-Nano Technology XIII, CSMNT 2011 |
| 会议日期 | 2012 |
| 卷号 | 503 |
| 页码 | 169-173 |
| 通讯作者 | Wang, W. (weiminwang@qq.com) |
| 中文摘要 | A new hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror is proposed, a mirror array with 19 elements is fabricated by a surface micromachining process. This design has a good fitting capability and a fast dynamic response. The fabricated sample is tested by an optical profiler. Simulation and test results indicate that it has a small aperture size, a high fill factor, a fast response time and a high working bandwidth. This new device provides a possibility of manufacturing a large-actuator-count DM for high speed wavefront control. © (2012) Trans Tech Publications, Switzerland. |
| 英文摘要 | A new hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror is proposed, a mirror array with 19 elements is fabricated by a surface micromachining process. This design has a good fitting capability and a fast dynamic response. The fabricated sample is tested by an optical profiler. Simulation and test results indicate that it has a small aperture size, a high fill factor, a fast response time and a high working bandwidth. This new device provides a possibility of manufacturing a large-actuator-count DM for high speed wavefront control. © (2012) Trans Tech Publications, Switzerland. |
| 收录类别 | EI |
| 语种 | 英语 |
| ISSN号 | 10139826 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7890]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 1.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China 2.School of Optoelectronic Information, University of Electronic Science and Technology of China, Chengdu, Sichuan 610054, China 3.Graduate University of Chinese Academy of Sciences, Beijing 100049, China |
| 推荐引用方式 GB/T 7714 | Wang, Weimin,Tao, Fenggang,Zhang, Jianfei,et al. A 19 element hexagonal actuator arrangement continuous face-sheet MEMS deformable mirror[C]. 见:Key Engineering Materials, 13th Annual Conference of Chinese Society of Micro-Nano Technology XIII, CSMNT 2011. 2012. |
入库方式： OAI收割
来源：光电技术研究所
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