MEMS grating with interdigitated-comb structure
文献类型：会议论文
| 作者 | Zhang, Heng1,2; Yao, Jun1; Tao, Fenggang1,2; Zhuang, Xuye1 |
| 出版日期 | 2012 |
| 会议名称 | Key Engineering Materials, 13th Annual Conference of Chinese Society of Micro-Nano Technology XIII, CSMNT 2011 |
| 会议日期 | 2012 |
| 卷号 | 503 |
| 页码 | 49-54 |
| 通讯作者 | Zhang, H. (zhukl@foxmail.com) |
| 中文摘要 | Grating as an important spectral component can be applied to spectral analysis, filtering, dispersion compensation, sensing and so on. Their advantages are compactness, potentially high actuation speed and the ability to deflect light at large angles. In this paper, a MEMS interdigitated-comb grating actuated by a comb-drive actuator is presented. An experiment is performed to demonstrate how the proposed grating works with an applied voltage. At 85V, the displacement of comb-drive actuator can achieve 2.1μm; accordingly the gap between the interdigitated-comb gratings varies by 2.1μm. The mechanical and the optical sensing properties of the MEMS grating are both analyzed in this paper. This grating can be widely used in optical sensor and to detect the micro-displacement. © (2012) Trans Tech Publications, Switzerland. |
| 英文摘要 | Grating as an important spectral component can be applied to spectral analysis, filtering, dispersion compensation, sensing and so on. Their advantages are compactness, potentially high actuation speed and the ability to deflect light at large angles. In this paper, a MEMS interdigitated-comb grating actuated by a comb-drive actuator is presented. An experiment is performed to demonstrate how the proposed grating works with an applied voltage. At 85V, the displacement of comb-drive actuator can achieve 2.1μm; accordingly the gap between the interdigitated-comb gratings varies by 2.1μm. The mechanical and the optical sensing properties of the MEMS grating are both analyzed in this paper. This grating can be widely used in optical sensor and to detect the micro-displacement. © (2012) Trans Tech Publications, Switzerland. |
| 收录类别 | EI |
| 语种 | 英语 |
| ISSN号 | 10139826 |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7891]  |
| 专题 | 光电技术研究所_微细加工光学技术国家重点实验室（开放室） |
| 作者单位 | 1.State Key of Optic Technologies for Micro Fabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, 610209, China 2.Graduate University of Chinese Academy of Sciences, Beijing 100039, China |
| 推荐引用方式 GB/T 7714 | Zhang, Heng,Yao, Jun,Tao, Fenggang,et al. MEMS grating with interdigitated-comb structure[C]. 见:Key Engineering Materials, 13th Annual Conference of Chinese Society of Micro-Nano Technology XIII, CSMNT 2011. 2012. |
入库方式： OAI收割
来源：光电技术研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。