中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Theoretical and experimental study on the active support

文献类型:会议论文

作者Wu Yongqian; Wu Fan; Wu Gaofeng
出版日期2010
会议名称Proceedings of the SPIE - The International Society for Optical Engineering
会议日期2010
卷号7655
页码76553J (7 pp.)
通讯作者Wu Yongqian
中文摘要The model of the multiunit control system of flexible mirror is established. The studies have shown that the surface error can be reduced with multiunit active supports effectively. The experiment of active system of 31 units, Phi 300mm demonstrates the validation of the control algorithm, and reduces 90% of the error.
英文摘要The model of the multiunit control system of flexible mirror is established. The studies have shown that the surface error can be reduced with multiunit active supports effectively. The experiment of active system of 31 units, Phi 300mm demonstrates the validation of the control algorithm, and reduces 90% of the error.
收录类别EI ; ISTP
语种英语
源URL[http://ir.ioe.ac.cn/handle/181551/7573]  
专题光电技术研究所_先光中心
作者单位中国科学院光电技术研究所
推荐引用方式
GB/T 7714
Wu Yongqian,Wu Fan,Wu Gaofeng. Theoretical and experimental study on the active support[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering. 2010.

入库方式: OAI收割

来源:光电技术研究所

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