Theoretical and experimental study on the active support
文献类型:会议论文
作者 | Wu Yongqian; Wu Fan; Wu Gaofeng |
出版日期 | 2010 |
会议名称 | Proceedings of the SPIE - The International Society for Optical Engineering |
会议日期 | 2010 |
卷号 | 7655 |
页码 | 76553J (7 pp.) |
通讯作者 | Wu Yongqian |
中文摘要 | The model of the multiunit control system of flexible mirror is established. The studies have shown that the surface error can be reduced with multiunit active supports effectively. The experiment of active system of 31 units, Phi 300mm demonstrates the validation of the control algorithm, and reduces 90% of the error. |
英文摘要 | The model of the multiunit control system of flexible mirror is established. The studies have shown that the surface error can be reduced with multiunit active supports effectively. The experiment of active system of 31 units, Phi 300mm demonstrates the validation of the control algorithm, and reduces 90% of the error. |
收录类别 | EI ; ISTP |
语种 | 英语 |
源URL | [http://ir.ioe.ac.cn/handle/181551/7573] ![]() |
专题 | 光电技术研究所_先光中心 |
作者单位 | 中国科学院光电技术研究所 |
推荐引用方式 GB/T 7714 | Wu Yongqian,Wu Fan,Wu Gaofeng. Theoretical and experimental study on the active support[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering. 2010. |
入库方式: OAI收割
来源:光电技术研究所
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