中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
Experimental study on the absolute measurement of flats

文献类型:会议论文

作者Zhao, Wenchuan1; Song, Weihong2; Wu, Gaofeng1; Wu, Yongqian1
出版日期2014
会议名称Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology
会议日期2014
页码503-506
中文摘要We present an absolute method of shift-rotation to calibrate the flatness of flats. Compared with the conventional three-flat test method, the method requires only two flat and no flips of the flats. And there will be no sag errors introduced by gravity deformations because of the flips of flats. The details of the method are given out in the paper. With multi-rotational measurements and translation measurements, the surface deviation of flats can be obtained with the method. Experimental results are presented to show the availability of the absolute method. © Springer-Verlag Berlin Heidelberg 2014.
英文摘要We present an absolute method of shift-rotation to calibrate the flatness of flats. Compared with the conventional three-flat test method, the method requires only two flat and no flips of the flats. And there will be no sag errors introduced by gravity deformations because of the flips of flats. The details of the method are given out in the paper. With multi-rotational measurements and translation measurements, the surface deviation of flats can be obtained with the method. Experimental results are presented to show the availability of the absolute method. © Springer-Verlag Berlin Heidelberg 2014.
收录类别EI
学科主题Optical image storage - Testing - Units of measurement
语种英语
源URL[http://ir.ioe.ac.cn/handle/181551/7611]  
专题光电技术研究所_先光中心
作者单位1.Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu, 610209, China
2.Chinese Academy of Sciences, Graduate University, Beijing, 100039, China
推荐引用方式
GB/T 7714
Zhao, Wenchuan,Song, Weihong,Wu, Gaofeng,et al. Experimental study on the absolute measurement of flats[C]. 见:Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology. 2014.

入库方式: OAI收割

来源:光电技术研究所

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