Experimental study on the absolute measurement of flats
文献类型:会议论文
作者 | Zhao, Wenchuan1; Song, Weihong2; Wu, Gaofeng1; Wu, Yongqian1 |
出版日期 | 2014 |
会议名称 | Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology |
会议日期 | 2014 |
页码 | 503-506 |
中文摘要 | We present an absolute method of shift-rotation to calibrate the flatness of flats. Compared with the conventional three-flat test method, the method requires only two flat and no flips of the flats. And there will be no sag errors introduced by gravity deformations because of the flips of flats. The details of the method are given out in the paper. With multi-rotational measurements and translation measurements, the surface deviation of flats can be obtained with the method. Experimental results are presented to show the availability of the absolute method. © Springer-Verlag Berlin Heidelberg 2014. |
英文摘要 | We present an absolute method of shift-rotation to calibrate the flatness of flats. Compared with the conventional three-flat test method, the method requires only two flat and no flips of the flats. And there will be no sag errors introduced by gravity deformations because of the flips of flats. The details of the method are given out in the paper. With multi-rotational measurements and translation measurements, the surface deviation of flats can be obtained with the method. Experimental results are presented to show the availability of the absolute method. © Springer-Verlag Berlin Heidelberg 2014. |
收录类别 | EI |
学科主题 | Optical image storage - Testing - Units of measurement |
语种 | 英语 |
源URL | [http://ir.ioe.ac.cn/handle/181551/7611] |
专题 | 光电技术研究所_先光中心 |
作者单位 | 1.Chinese Academy of Sciences, Institute of Optics and Electronics, Chengdu, 610209, China 2.Chinese Academy of Sciences, Graduate University, Beijing, 100039, China |
推荐引用方式 GB/T 7714 | Zhao, Wenchuan,Song, Weihong,Wu, Gaofeng,et al. Experimental study on the absolute measurement of flats[C]. 见:Fringe 2013 - 7th International Workshop on Advanced Optical Imaging and Metrology. 2014. |
入库方式: OAI收割
来源:光电技术研究所
浏览0
下载0
收藏0
其他版本
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。