High accurate subaperture testing
文献类型：会议论文
| 作者 | Yan, Fengtao1,2; Fan, Bin1; Hou, Xi1; Wu, Fan1; Lei, Baiping1 |
| 出版日期 | 2014 |
| 会议名称 | Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment |
| 会议日期 | 2014 |
| 卷号 | 9282 |
| 页码 | 92822H |
| 中文摘要 | We introduced a high accurate subaperture testing method. This stitching method could reduce the interferometers deviation to the stitching results. This high accurate subaperture testing is determined by the data processing technique based on multiangle averaging method and Zernike polynomial fitting method. This technique does not require any assumptions about the surfaces under test. The experiment results shows that this high accurate subaperture testing method not only get the full absolute figure of the large mirrors but also can get the reference mirrors figure and calibrate it and the root mean square (rms) of residual figures between the two methods are -0.80nm and -0.87nm. © 2014 SPIE. |
| 英文摘要 | We introduced a high accurate subaperture testing method. This stitching method could reduce the interferometers deviation to the stitching results. This high accurate subaperture testing is determined by the data processing technique based on multiangle averaging method and Zernike polynomial fitting method. This technique does not require any assumptions about the surfaces under test. The experiment results shows that this high accurate subaperture testing method not only get the full absolute figure of the large mirrors but also can get the reference mirrors figure and calibrate it and the root mean square (rms) of residual figures between the two methods are -0.80nm and -0.87nm. © 2014 SPIE. |
| 收录类别 | EI |
| 学科主题 | Calibration - Data handling - Manufacture - Mirrors |
| 语种 | 英语 |
| ISSN号 | 0277786X |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7621]  |
| 专题 | 光电技术研究所_先光中心 |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, China 2.University of the Chinese Academy of Sciences, Beijing, China |
| 推荐引用方式 GB/T 7714 | Yan, Fengtao,Fan, Bin,Hou, Xi,et al. High accurate subaperture testing[C]. 见:Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment. 2014. |
入库方式： OAI收割
来源：光电技术研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。