Modeling Fizeau interferometer based on ray tracing with Zemax
文献类型：会议论文
| 作者 | He, Yiwei1,2; Hou, Xi1; Wu, Yongqian1; Wu, Fan1; Quan, Haiyang1; Liu, Fengwei1 |
| 出版日期 | 2015 |
| 会议名称 | Proceedings of SPIE - The International Society for Optical Engineering |
| 会议日期 | 2015 |
| 卷号 | 9677 |
| 页码 | 96771G |
| 通讯作者 | He, Yiwei |
| 中文摘要 | A convenient method to study the influence of error sources in Fizeau is to build a ray-tracing model to simulate the error sources. In this paper an interferometer model is presented; an extension program is called to simulate the interference; and a preliminary research of several error sources is conducted. These examples demonstrate error analysis based on interferometer models is feasible and provide some guidance for optimizing our interferometer design. © 2015 SPIE. |
| 英文摘要 | A convenient method to study the influence of error sources in Fizeau is to build a ray-tracing model to simulate the error sources. In this paper an interferometer model is presented; an extension program is called to simulate the interference; and a preliminary research of several error sources is conducted. These examples demonstrate error analysis based on interferometer models is feasible and provide some guidance for optimizing our interferometer design. © 2015 SPIE. |
| 收录类别 | SCI ; EI |
| 学科主题 | Error analysis - Errors - Interferometers - Laser optics - Optical testing - Surface measurement |
| 语种 | 英语 |
| ISSN号 | 0277-786X |
| 源URL | [http://ir.ioe.ac.cn/handle/181551/7627]  |
| 专题 | 光电技术研究所_先光中心 |
| 作者单位 | 1.Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan, China 2.University of Chinese Academy of Sciences, Beijing, China |
| 推荐引用方式 GB/T 7714 | He, Yiwei,Hou, Xi,Wu, Yongqian,et al. Modeling Fizeau interferometer based on ray tracing with Zemax[C]. 见:Proceedings of SPIE - The International Society for Optical Engineering. 2015. |
入库方式： OAI收割
来源：光电技术研究所
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